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Stage drive method, stage apparatus, and exposure apparatus

  • US 20060215144A1
  • Filed: 05/12/2006
  • Published: 09/28/2006
  • Est. Priority Date: 11/17/2003
  • Status: Abandoned Application
First Claim
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1. A stage drive method for driving a stage on a surface of a surface plate along a guide part that extends in a first direction, comprising the step of:

  • rotating the guide part about an axis perpendicular to the surface based on a thrust occurring when the stage is driven in the first direction.

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