Stage drive method, stage apparatus, and exposure apparatus

• US 20060215144A1
• Filed: 05/12/2006
• Published: 09/28/2006
• Est. Priority Date: 11/17/2003
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Shibazaki, Yuichi
• Application Number:
  US11/432,508
• Publication Number:
  US 20060215144A1
• Time in Patent Office: Days
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask

Abstract

A stage drive method for driving a stage on a surface of a surface plate along a guide part that extends in a first direction includes the step of rotating the guide part about an axis perpendicular to the surface based on a thrust occurring when the stage is driven in the first direction. It is possible to increase safety without causing gap collapse to occur even in the case where a moment load is applied to the guide part.

Claims

1. A stage drive method for driving a stage on a surface of a surface plate along a guide part that extends in a first direction, comprising the step of:

rotating the guide part about an axis perpendicular to the surface based on a thrust occurring when the stage is driven in the first direction.

2. A stage drive method according to claim 1, wherein:

a pair of drive apparatus that drive the guide part in a second direction that intersects the first direction are provided at both ends of the guide part, and

the guide part is rotated about the axis by means of differential movement of the pair of the drive apparatuses.

3. A stage drive method according to claim 2, further comprising the step of:

detecting a relative positional relationship between at least one of the pair of drive apparatuses and the guide part.

4. A stage drive method according to claim 1, further comprising the step of:

rotating the guide part in a rotation direction that is opposite to the rotation direction about the axis prior to driving of the stage.

5. A stage drive method according to claim 1, further comprising the step of:

attaching the stage to and removing the stage from the guide part.

6. A stage apparatus that drives a stage on a surface of a surface plate along a guide part that extends in a first direction;

comprising;

a rotary drive apparatus that rotates and drives the guide part about an axis perpendicular to the surface based on a thrust occurring when the stage is driven in the first direction.

7. A stage apparatus according to claim 6, further comprising:

a pair of drive apparatuses that drive the guide part in a second direction that intersects the first direction are provided at both ends of the guide part, wherein

the guide part is rotated about the axis by means of differential movement of the pair of drive apparatuses.

8. A stage apparatus according to claim 6, wherein a plurality of the stages and a plurality of the guide parts are provided.

9. A stage apparatus according to claim 6, wherein the stage is provided so that it is freely attached and removed with respect to the guide part.

10. A stage apparatus according to claim 6, further comprising;

a drive apparatus that rotates the guide part in a rotation direction that is opposite to the rotation direction about the axis when the stage does not move in the first direction.

11. A stage apparatus according to claim 6, wherein the stage is a cantilever stage that is supported in a cantilever manner by the guide part.

12. An exposure apparatus for exposing a substrate held on a substrate stage with a pattern of a mask held on a mask stage, comprising:

a stage apparatus according to claim 6 is used as at least one of the mask stage and the substrate stage.