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Multi-axis interferometer with procedure and data processing for mirror mapping

  • US 20060215173A1
  • Filed: 03/17/2006
  • Published: 09/28/2006
  • Est. Priority Date: 03/18/2005
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • locating a plurality of alignment marks on a moveable stage;

    interferometrically measuring a position of a measurement object along an interferometer axis for each of the alignment mark locations; and

    using the interferometric position measurements to derive information about a surface figure of the measurement object, wherein the position of the measurement object is measured using an interferometry assembly and either the measurement object or the interferometry assembly are attached to the stage.

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