Surface and subsurface detection sensor
First Claim
Patent Images
1. A sensor comprising:
- an optical modulator that generates a modulation signal;
an interferometer that mixes the modulation signal with an acoustic signal evoked by a pulsed laser to down-convert the acoustic signal to lower frequencies; and
a multiple-dimensional photodetector that detects the down-converted signal.
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Abstract
A sensor comprises an optical modulator that generates a modulation signal, an interferometer that mixes an acoustic signal evoked by a pulsed laser with the modulation signal to down-convert the acoustic signal to lower frequencies, and a photodetector that detects the down-converted signal.
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Citations
66 Claims
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1. A sensor comprising:
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an optical modulator that generates a modulation signal;
an interferometer that mixes the modulation signal with an acoustic signal evoked by a pulsed laser to down-convert the acoustic signal to lower frequencies; and
a multiple-dimensional photodetector that detects the down-converted signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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39. A method of acquiring subsurface structural information comprising:
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illuminating a sample under test with a pulsed laser signal that propagates a shock wave through the sample; and
measuring a surface vibration signature of a micro or nano structure of the sample induced by the pulsed laser signal; and
analyzing an acoustic spectrum to determine sample critical dimensions. - View Dependent Claims (40, 41, 42, 43)
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44. A sensor comprising:
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an optical modulator that generates a modulation signal;
an interferometer that mixes the modulation signal with an acoustic signal evoked by a pulsed laser to down-convert the acoustic signal to lower frequencies;
a photodetector that detects the down-converted signal; and
processing electronics coupled to the photodetector and configured to perform phase sensitive measurement of elastic waves. - View Dependent Claims (38, 45, 46, 47, 48, 49, 50, 51)
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52. A sensor comprising:
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an optical modulator that generates a modulation signal;
an interferometer that mixes the modulation signal with an acoustic signal evoked by a pump laser beam to down-convert the acoustic signal to lower frequencies;
a photodetector that detects the down-converted signal; and
a direct modulated light coupled to the interferometer and operative as an acoustic excitation source. - View Dependent Claims (53, 54, 55, 56, 57, 58)
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59. A sensor comprising:
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an optical modulator that generates a modulation signal;
a plurality of interferometers that mix the modulation signal with an acoustic signal evoked by a pulsed laser to down-convert the acoustic signal to lower frequencies, the interferometer plurality configured to generate frequency modulation higher than attained for a singular modulator; and
a photodetector that detects the down-converted signal. - View Dependent Claims (60, 61, 62, 63, 64, 65, 66)
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Specification