System and method for determining a shape of a surface of an object and method of manufacturing an object having a surface of a predetermined shape
First Claim
Patent Images
1. A method of determining a shape of a surface of an object, the method comprising:
- generating measuring light of plural different wavelengths;
directing the measuring light onto the surface of the object through a chromatic illuminating optics such that the measuring light is incident at plural locations of the surface, wherein, at each said location, a direction of incidence of measuring light of a first wavelength differs from a direction of incidence of measuring light of a second wavelength by more than 1 arcmin;
directing a portion of measuring light reflected from the surface of the object onto a light detecting surface of a detector through an imaging optics, wherein more than one third of the reflected measuring light of the plural different wavelengths entering the imaging optics is blocked from being incident on the light detecting surface of the detector;
detecting wavelength dependent distributions of an intensity of the measuring light incident on the detector; and
determining a shape of the surface of the object based upon the detected wavelength dependent distributions of intensity.
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Abstract
A system and method for determining a shape of a surface comprises a chromatic imaging optics for generating a dispersion in a measuring light. Colour information contained in measuring light emerging from the surface to be tested and received by a detector may be used to determine the shape of the surface to tested.
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Citations
50 Claims
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1. A method of determining a shape of a surface of an object, the method comprising:
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generating measuring light of plural different wavelengths;
directing the measuring light onto the surface of the object through a chromatic illuminating optics such that the measuring light is incident at plural locations of the surface, wherein, at each said location, a direction of incidence of measuring light of a first wavelength differs from a direction of incidence of measuring light of a second wavelength by more than 1 arcmin;
directing a portion of measuring light reflected from the surface of the object onto a light detecting surface of a detector through an imaging optics, wherein more than one third of the reflected measuring light of the plural different wavelengths entering the imaging optics is blocked from being incident on the light detecting surface of the detector;
detecting wavelength dependent distributions of an intensity of the measuring light incident on the detector; and
determining a shape of the surface of the object based upon the detected wavelength dependent distributions of intensity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of determining a shape of a surface of an object, the method comprising:
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generating measuring light of different wavelengths to be incident on the surface of the object from different directions of incidence;
allowing measuring light emerging from an extended region of the surface to traverse an imaging optics;
detecting a light intensity of each of plural groups of rays of the measuring light having traversed the imaging optics, wherein each group of rays has associated therewith a range of wavelengths of its rays and a range of angles of the rays relative to a predetermined direction, wherein the groups are selected such that the detected light intensities of less than one half of all the groups are greater than twice a background intensity; and
determining a shape of the extended region of the surface of the object based upon the detected intensities. - View Dependent Claims (16, 17, 18, 19)
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20. A method of manufacturing an object having a surface of a target shape, the method comprising:
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generating measuring light of plural different wavelengths;
directing the measuring light onto the surface of the object through a chromatic illuminating optics such that the measuring light is incident at plural locations of the surface, wherein, at each said location, a direction of incidence of measuring light of a first wavelength differs from a direction of incidence of measuring light of a second wavelength by more than 1 arcmin;
directing a portion of measuring light reflected from the surface of the object onto a light detecting surface of a detector through an imaging optics, wherein more than one third of the reflected measuring light of the plural different wavelengths entering the imaging optics is blocked from being incident on the light detecting surface of the detector;
detecting wavelength dependent distributions of an intensity of the measuring light incident on the detector;
determining deviations of a shape of the surface of the object based upon the detected wavelength dependent distributions of intensity; and
processing the surface of the object based on the determined deviations. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31)
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32. A system for measuring a shape of a surface of an object, the system comprising:
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a light source for generating measuring light within a broad wavelength range;
a chromatic illuminating optics for directing the measuring light onto the surface of the object, wherein the chromatic illuminating optics has a front surface of an optical element disposed closest to the object to be measured, and wherein a dispersion of the chromatic illuminating optics is such that, at each of plural locations on the front surface, an emission direction of measuring light of a first wavelength differs from an emission direction of measuring light of a second wavelength by more than 1 arcmin;
an imaging optics for imaging the surface of the object onto a light detecting surface of a detector, wherein the imaging optics comprises a beam stop having an aperture disposed within a beam path of the imaging optics, the aperture having a cross section of a size which is smaller than a third of a size of an effective cross section of the beam path of the imaging optics upstream of the beam stop; and
a spectral selector transmitting only measuring light within a narrow wavelength range, wherein the spectral selector is disposed in a beam path of the measuring light between the light source and the detector. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39)
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40. A system for measuring a shape of a surface of an object, the system comprising:
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an imaging optics;
a beam stop having an aperture;
a test piece mount configured to mount the object such that the surface of the object is disposed at a distance from a position which is conjugate to the aperture with respect to the imaging optics;
a position sensitive detector to detect measuring light emerging from the surface of the object and having traversed the imaging optics and the aperture;
a light source for generating measuring light within a broad wavelength range;
a chromatic illuminating optics for directing the measuring light onto the surface;
a spectral selector to select, from the broad wavelength range, an adjustable narrow wavelength range of the measuring light to be incident on the position sensitive detector, wherein a ratio of a width of the narrow wavelength range over a width of the broad wavelength range is less than ¼
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a controller configured to control the spectral selector such that plural different narrow wavelength ranges are subsequently adjusted and to receive a representation of light intensities detected by the position sensitive detector for each of the plural different narrow wavelength ranges. - View Dependent Claims (41, 42, 43, 44, 45, 46, 47)
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48. A method of determining a shape of a surface of an object, the method comprising:
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generating measuring light of different wavelengths to be incident on the surface of the object from different directions of incidence;
detecting wavelength dependent distributions of an intensity of the measuring light reflected from the object; and
determining a shape of the surface of the object based upon the detected wavelength dependent distributions of intensity. - View Dependent Claims (49)
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50. A system for measuring a shape of a surface of an object, the system comprising:
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a light source for generating measuring light within a wavelength range;
an illuminating optics for directing the measuring light onto the surface of the object;
an imaging optics for imaging the surface of the object onto a light detecting surface of a detector;
wherein the illuminating optics and the imaging optics are configured such that first and second aspherical optical surfaces can be disposed relative to the illuminating optics, wherein corresponding locations of the first and second aspherical optical surfaces are imaged onto same locations on the light detecting surface of the detector, and wherein orientations of the first and second surfaces at the corresponding locations may differ by more than arcsin (λ
min/2p), wherein;
λ
min is a smallest wavelength of the measuring light, andp is a pitch of detector pixels in the light detecting surface of the detector.
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Specification