Embedded capacitor structure
First Claim
Patent Images
1. An embedded capacitor structure comprising a main body;
- at least one embedded capacitor, having a first electrode, a dielectric layer, and a second electrode, formed in the main body; and
at least one via electrical connection formed in the main body;
wherein at least one of the first and second electrodes is free from direct electrical connection to the via electrical connections.
1 Assignment
0 Petitions
Accused Products
Abstract
An embedded capacitor structure comprising a main body; at least one embedded capacitor, having a first electrode, a dielectric layer, and a second electrode, formed in the main body; and at least one via electrical connection formed in the main body; wherein at least one of the first and second electrodes is free from direct electrical connection to the via electrical connections.
67 Citations
12 Claims
-
1. An embedded capacitor structure comprising
a main body; -
at least one embedded capacitor, having a first electrode, a dielectric layer, and a second electrode, formed in the main body; and
at least one via electrical connection formed in the main body;
wherein at least one of the first and second electrodes is free from direct electrical connection to the via electrical connections. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A method of manufacturing an embedded capacitors structure, the method comprising:
-
forming at least one embedded capacitor in a main body for the embedded capacitor structure, the embedded capacitor having a first electrode, a dielectric layer, and a second electrode; and
forming at least one via electrical connection in the main body;
wherein at least one of the first and second electrode is free from direct electrical connection to the via electrical connections. - View Dependent Claims (12)
-
Specification