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External volume insensitive flow verification

  • US 20060217903A1
  • Filed: 03/25/2005
  • Published: 09/28/2006
  • Est. Priority Date: 03/25/2005
  • Status: Active Grant
First Claim
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1. A flow verifier for in-situ verification of a device under test (DUT), comprising:

  • an inlet connectable to a DUT;

    an outlet connectable to a vacuum pump for drawing gas through the DUT and the flow verifier;

    a vessel having a predetermined volume;

    diffusive media connecting the inlet to the vessel;

    an outlet valve connecting the vessel to the outlet for controlling flow from the vessel to the outlet;

    at least one temperature sensor operatively connected to the vessel for providing temperature measurements from within the vessel; and

    a pressure transducer operatively connected to the vessel for providing pressure measurements from within the vessel.

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