External volume insensitive flow verification

• US 20060217903A1
• Filed: 03/25/2005
• Published: 09/28/2006
• Est. Priority Date: 03/25/2005
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Shajii, Ali, Smith, Daniel Alexander
• Granted Patent: US 7,174,263 B2
• Time in Patent Office: Days
• US Class Current: 702/47
• CPC Class Codes: G01F 25/15 specially adapted for gas meters G01F25/11 - G01F25/14, G01F25/17 take precedence
• CPC Class Codes: G01F 25/17 using calibrated reservoirs

Abstract

A flow verifier for in-situ verification of a device under test (DUT), including an inlet connectable to a DUT, an outlet connectable to a vacuum pump for drawing gas through the DUT and the flow verifier, a vessel having a predetermined volume, diffusive media connecting the inlet to the vessel, an outlet valve connecting the vessel to the outlet for controlling flow from the vessel to the outlet, at least one temperature sensor operatively connected to the vessel for providing temperature measurements from within the vessel, and a pressure transducer operatively connected to the vessel for providing pressure measurements from within the vessel.

Claims

1. A flow verifier for in-situ verification of a device under test (DUT), comprising:

an inlet connectable to a DUT;

an outlet connectable to a vacuum pump for drawing gas through the DUT and the flow verifier;

a vessel having a predetermined volume;

diffusive media connecting the inlet to the vessel;

an outlet valve connecting the vessel to the outlet for controlling flow from the vessel to the outlet;

at least one temperature sensor operatively connected to the vessel for providing temperature measurements from within the vessel; and

a pressure transducer operatively connected to the vessel for providing pressure measurements from within the vessel.

2. A flow verifier according to claim 1, wherein the diffusive media comprises a capillary tube.

3. A flow verifier according to claim 1, wherein the diffusive media comprises a porous plug.

4. A flow verifier according to claim 1, wherein the diffusive media comprises a plurality of spaced flow restrictors connected in series.

5. A flow verifier according to claim 1, wherein the at least one temperature sensor comprises two or more temperature sensors adapted to provide an average temperature measurement from within the vessel.

6. A flow verifier according to claim 1, further comprising a controller connected to the temperature sensor, the pressure transducer and the valve and including a timer, wherein, upon the flow verifier being connected between the DUT and the vacuum pump, the vacuum pump being operated, and the DUT being provided with a flow set point, the controller is programmed to:

open the valve;

allow flow and pressure within the vessel to reach a steady state;

close the valve and record temperature and pressure measurements T, P within the predetermined volume of the vessel at time t=0;

record temperature and pressure measurements T, P within the predetermined volume of the vessel at predetermined intervals until time t=N;

calculate a time derivative of the vessel pressure divided by the vessel temperature, Δ

(P/T)/Δ

t, based on the temperature and pressure measurements within the predetermined volume of the vessel from t=0 to t=N; and

calculate a flow rate produced by the DUT based upon the time derivatives of temperature and pressure within the predetermined volume of the vessel from t=0 to t=N.

7. A flow verifier according to claim 6, wherein the controller is further programmed to repeat the flow calculation steps s times and then calculate an average flow rate produced by the DUT through s times.

8. A flow verifier according to claim 6, wherein the flow rate Q is calculated by the controller using:

Q=(V_vesselT_STP/P_STP)(Δ

(P/T)/Δ

t)

where V_vessel is the predetermined volume of the vessel, T_STP is standard temperature of 0°

C. (273.15 K), P_STP is standard pressure of 1 atm (defined as 101.325 kPa), and Δ

(P/T)/Δ

t is a time derivative of the vessel pressure divided by the vessel temperature based on the temperature and pressure measurements within the predetermined volume of the vessel from t=0 to t=N.

9. A flow verifier according to claim 1, wherein the predetermined volume of the vessel is less than 20 cc.

10. A flow verifier according to claim 1, further comprising a bypass valve connected between the inlet and the outlet in parallel with the diffusive media, the vessel, and the outlet valve.

11. A method for in-situ verification of a device under test (DUT), comprising:

connecting a vessel having a predetermined volume between the DUT and a vacuum pump;

diffusing flow between the vessel and the DUT;

operating the vacuum pump such that gas is drawn through the DUT and the vessel;

providing the DUT with a flow set point and allowing flow and pressure within the vessel to reach a steady state;

stopping flow between the vessel and the vacuum pump;

recording temperature and pressure measurements T, P within the predetermined volume of the vessel at time t=0;

recording temperature and pressure measurements T, P within the predetermined volume of the vessel at predetermined intervals until time t=N;

calculating a time derivative of the vessel pressure divided by the vessel temperature, Δ

(P/T)/Δ

t, based on the temperature and pressure measurements within the predetermined volume of the vessel from t=0 to t=N; and

calculating a flow rate produced by the DUT based upon the time derivatives of temperature and pressure within the predetermined volume of the vessel from t=0 to t=N.

12. A method according to claim 11, wherein the flow calculation steps are repeated s times, and an average flow rate produced by the DUT is calculated through s times.

13. A method according to claim 11, wherein the flow rate Q is calculated using:

Q=(V_vesselT_STP/P_STP)(Δ

(P/T)/Δ

t)

where V_vessel is the predetermined volume of the vessel, T_STP is standard temperature of 0°

C. (273.15 K), P_STP is standard pressure of 1 atm (defined as 101.325 kPa), and Δ

(P/T)/Δ

t is a time derivative of the vessel pressure divided by the vessel temperature based on the temperature and pressure measurements within the predetermined volume of the vessel from t=0 to t=N.

14. A method according to claim 11, the predetermined volume of the vessel is less than 20 cc.

15. A method according to claim 11, wherein the flow between the vessel and the DUT is diffused using a capillary tube.

16. A method according to claim 11, wherein the flow between the vessel and the DUT is diffused using a porous plug.

17. A method according to claim 11, wherein the flow between the vessel and the DUT is diffused using a plurality of spaced flow restrictors connected in series.

18. A method according to claim 11, wherein the temperature measurements from within the vessel comprise average temperature measurements computed from temperature measurements simultaneously taken at multiple positions within the predetermined volume of the vessel.

19. A flow verifier for in-situ verification of a device under test (DUT), comprising:

an inlet connectable to a DUT;

an outlet connectable to a vacuum pump for drawing gas through the DUT and the flow verifier;

a vessel having a predetermined volume connected to the inlet;

an outlet valve connecting the vessel to the outlet for controlling flow from the vessel to the outlet;

at least one temperature sensor operatively connected to the vessel for providing temperature measurements from within the vessel;

a pressure transducer operatively connected to the vessel for providing pressure measurements from within the vessel; and

a controller connected to the temperature sensor, the pressure transducer and the valve and including a timer, wherein, upon the flow verifier being connected between the DUT and the vacuum pump, the vacuum pump being operated, and the DUT being provided with a flow set point, the controller is programmed to;

open the valve;

allow flow and pressure within the vessel to reach a steady state;

close the valve and record temperature and pressure measurements T, P within the predetermined volume of the vessel at time t=0;

record temperature and pressure measurements T, P within the predetermined volume of the vessel at predetermined intervals until time t=N;

calculate a time derivative of the vessel pressure divided by the vessel temperature, Δ

(P/T)/Δ

t, based on the temperature and pressure measurements within the predetermined volume of the vessel from t=0 to t=N; and

calculate a flow rate produced by the DUT based upon the time derivatives of temperature and pressure within the predetermined volume of the vessel from t=0 to t=N, wherein the flow rate Q is calculated using;

Q=(V_vesselT_STP/P_STP)(Δ

(P/T)/Δ

t)

where V_vessel is the predetermined volume of the vessel, T_STP is standard temperature of 0°

C. (273.15 K), P_STP is standard pressure of 1 atm (defined as 101.325 kPa), and Δ

(P/T)/Δ

t is a time derivative of the vessel pressure divided by the vessel temperature based on the temperature and pressure measurements within the predetermined volume of the vessel from t=0 to t=N.

20. A flow verifier according to claim 19, wherein a capillary tube connects the vessel to the inlet.