SYSTEM AND METHOD FOR DETECTING FLOW IN A MASS FLOW CONTROLLER
First Claim
1. A gate position sensor, comprising:
- an orifice and a gate adapted to adjust flow through the orifice;
a light source to generate a light signal; and
a light detector adapted to receive the light signal, the light detector being operably positioned with respect to the light source and the orifice such that movement of the gate with respect to the orifice affects a received light signal.
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Abstract
Systems and methods are provided for detecting flow in a mass flow controller (MFC). The position of a gate in the MFC is sensed or otherwise determined to monitor flow through the MFC and to immediately or nearly immediately detect a flow failure. In one embodiment of the present invention, a novel MFC is provided. The MFC includes an orifice, a mass flow control gate, an actuator and a gate position sensor. The actuator moves the control gate to control flow through the orifice. The gate position sensor determines the gate position and/or gate movement to monitor flow and immediately or nearly immediately detect a flow failure. According to one embodiment of the present invention, the gate position sensor includes a transmitter for transmitting a signal and a receiver for receiving the signal such that the receiver provides an indication of the position of the gate based on the signal received. Other embodiments of the gate position sensor are described herein, as well as systems and methods that incorporate the novel MFC within a semiconductor manufacturing process.
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Citations
25 Claims
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1. A gate position sensor, comprising:
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an orifice and a gate adapted to adjust flow through the orifice;
a light source to generate a light signal; and
a light detector adapted to receive the light signal, the light detector being operably positioned with respect to the light source and the orifice such that movement of the gate with respect to the orifice affects a received light signal. - View Dependent Claims (2, 3, 4)
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5. A gate position sensor, comprising:
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a transmitter for transmitting a signal in a flow controller, wherein a position of a gate in the flow controller affects the signal; and
a receiver for receiving the signal, wherein the receiver is adapted to provide a signal output for the sensor to indicate a gate position within the flow controller based on the signal received, wherein the transmitter is a light source, the signal is a light signal transmitted by the light source, and the receiver is a light detector operably positioned with respect to the light source and an orifice such that movement of the gate oscillating between an opened position and a closed position interrupts the light signal from being received by the light detector. - View Dependent Claims (6, 7)
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8. A gate position sensor for a flow controller having an orifice and a gate for closing the orifice, comprising:
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a light source positioned on a first side of the orifice; and
a light detector positioned with respect to the light source and the orifice such that movement of the gate oscillating between an opened position and a closed position interrupts a light signal generated by the light source from being received by the light detector. - View Dependent Claims (9, 10, 11, 12)
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13. A system, comprising:
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an ultrasonic mass flow controller with an orifice and a gate adapted to close the orifice;
a sensor, including;
a light source positioned on a first side of the orifice; and
a light detector positioned with respect to the light source and the orifice such that movement of the gate oscillating between an opened position and a closed position affects light received by the light detector from the light source. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A system, comprising:
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an inflow line;
a flow controller positioned in the inflow line for controlling flow, the flow controller including a gate and an actuator for moving the gate to control flow;
a gate position sensor for monitoring whether the gate is in an opened position or a closed position, the sensor including means for transmitting a signal in the flow controller such that a position of the gate in the flow controller affects the signal, and means for receiving the signal and providing a signal output for the sensor to indicate a gate position within the flow controller based on the signal received; and
a processor for controlling the position of the gate and for interfacing with the sensor, wherein the sensor includes a light source and a light detector, and wherein the light source and the light detector are operably positioned with respect to each other and an orifice such that movement of the gate oscillating between an opened position and a closed position interrupts the light signal from being received by the light detector. - View Dependent Claims (21, 22, 23, 24, 25)
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Specification