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SYSTEM AND METHOD FOR DETECTING FLOW IN A MASS FLOW CONTROLLER

  • US 20060218762A1
  • Filed: 06/01/2006
  • Published: 10/05/2006
  • Est. Priority Date: 08/30/2001
  • Status: Abandoned Application
First Claim
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1. A gate position sensor, comprising:

  • an orifice and a gate adapted to adjust flow through the orifice;

    a light source to generate a light signal; and

    a light detector adapted to receive the light signal, the light detector being operably positioned with respect to the light source and the orifice such that movement of the gate with respect to the orifice affects a received light signal.

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