Angular velocity sensor
First Claim
Patent Images
1. An angular velocity sensor comprising:
- a tuning fork resonator having multiple arms that extend from a base;
a single lead frame that supports the base; and
a package that supports the single lead frame, wherein the package and lead frame define a space therebetween.
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Accused Products
Abstract
An angular velocity sensor includes a tuning fork resonator having multiple arms that extend from a base, a single lead frame that supports the base, and a package that supports the single lead frame. The package and lead frame defines a space therebetween.
21 Citations
25 Claims
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1. An angular velocity sensor comprising:
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a tuning fork resonator having multiple arms that extend from a base;
a single lead frame that supports the base; and
a package that supports the single lead frame, wherein the package and lead frame define a space therebetween. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An angular velocity sensor comprising:
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multiple units, each of the multiple units including a tuning fork resonator and a single lead frame, the tuning fork resonator having multiple arms that extend from a base, the single lead frame supporting the base; and
a package that houses the multiple units, wherein the multiple units are arranged in the package so that the multiple units have different angular velocity detection axes. - View Dependent Claims (19, 20, 21)
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22. An angular velocity sensor comprising:
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multiple angular velocity sensor elements; and
a circuit board on which the multiple angular velocity sensor elements are mounted, wherein;
each of the multiple angular velocity sensor elements includes a tuning fork resonator, a single lead frame, and a package, the tuning fork resonator having multiple arms that extend from a base, the single lead frame supporting the base, the package supporting the single lead frame; and
the package and the single lead frame defines a space. - View Dependent Claims (23, 24, 25)
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Specification