MEMS filter module with concentric filtering walls
First Claim
1. A MEMS filter module, comprising:
- a first plate comprising a plurality of first flow ports;
a second plate comprising a plurality of second flow ports;
a plurality of filtering walls, wherein each said filtering wall extends along at least part of one of a plurality of at least generally concentrically disposed filtering wall reference circles, wherein each of said plurality of filtering wall reference circles has at least one associated said filtering wall, wherein each said filtering wall extends from said second plate in a direction of said first plate, and wherein a space between said first plate and each said filtering wall defines a filter trap.
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Accused Products
Abstract
A bidirectional flow MEMS filter module (40) is disclosed that uses a plurality of concentrically disposed filtering walls (60). The MEMS filter module (40) includes a first plate (44) having a plurality of first flow ports (48), as well as a second plate (52) having a plurality of second flow ports (56) that is spaced from and interconnected with the first plate (44). The above-noted filtering walls (60) extend from the second plate (52) at least toward the first plate (44). The first plate (44) and each filtering wall (60) are spaced from each other to define a filter trap (64). All flow through the MEMS filter module (40) must pass through at least one filter trap (64) prior to exiting the MEMS filter module (40), either through one or more of the first flow ports (48) or through one or more of the second flow ports (56).
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Citations
32 Claims
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1. A MEMS filter module, comprising:
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a first plate comprising a plurality of first flow ports;
a second plate comprising a plurality of second flow ports;
a plurality of filtering walls, wherein each said filtering wall extends along at least part of one of a plurality of at least generally concentrically disposed filtering wall reference circles, wherein each of said plurality of filtering wall reference circles has at least one associated said filtering wall, wherein each said filtering wall extends from said second plate in a direction of said first plate, and wherein a space between said first plate and each said filtering wall defines a filter trap. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A MEMS filter module, comprising:
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a first plate comprising a plurality of first flow ports;
a second plate comprising a plurality of second flow ports;
a plurality of annular filtering walls that are disposed about a common point, wherein each said filtering wall extends from said second plate in a direction of said first plate, and wherein a space between said first plate and each said filtering wall defines a filter trap. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification