APPARATUS FOR USE IN THINNING A SEMICONDUCTOR WORKPIECE

• US 20060220329A1
• Filed: 06/12/2006
• Published: 10/05/2006
• Est. Priority Date: 08/20/2004
• Status: Abandoned Application

• Current Assignee: Semitool Incorporated (Applied Materials Incorporated)
• Original Assignee: Semitool Incorporated (Applied Materials Incorporated)
• Inventors: Thompson, Raymon F., Dolechek, Kert L.
• Application Number:
  US11/423,582
• Publication Number:
  US 20060220329A1
• Time in Patent Office: Days
• US Class Current: 279/158
• CPC Class Codes: H01L 21/6835 using temporarily an auxiliary support
• CPC Class Codes: H01L 2221/6834 used to protect an active side of a device or wafer
• CPC Class Codes: Y10T 279/35 Miscellaneous

Abstract

The present invention provides an apparatus and method for use in processing semiconductor workpieces. The new apparatus and method allows for the production of thinner workpieces that at the same time remain strong. Particularly, a chuck is provided that includes a body, a retainer removeably attached to the body and a seal forming member. When a workpiece is placed on the chuck body and the retainer is engaged to the body, a peripheral portion of the back side of the workpiece is covered by the retainer while an interior region of the back side of the workpiece is exposed. The exposed back side of the workpiece is then subjected to a wet chemical etching process to thin the workpiece and form a relatively thick rim comprised of semiconductor material at the periphery of the workpiece. The thick rim or hoop imparts strength to the otherwise fragile, thinned semiconductor workpiece. Semiconductor workpieces made according to the present invention offer an improved structure for handling thinned wafers in conventional automated equipment. This results in improved yields and improved process efficiency.

Claims

1. A chuck for receiving and supporting a semiconductor workpiece with a device side and a back side, the chuck comprising:

a body for supporting the workpiece;

a retainer removeably attached to the body and adapted to cover a peripheral portion of the back side of the workpiece; and

a member forming a seal between the retainer and the back side of the workpiece, the member having an outer portion with a surface downwardly sloped towards the workpiece to create an angle at a point of contact between the member and the workpiece.

2. The chuck of claim 1, wherein the angle at the point of contact between the member and the workpiece is approximately 90 degrees.

3. The chuck of claim 1, wherein the angle at the point of contact between the member and the workpiece is greater than 90 degrees.

4. The chuck of claim 1, wherein the member is configured to aid in the continuous distribution of a process fluid at the point of contact between the member and the workpiece.

5. The chuck of claim 1, wherein the retainer is comprised of polyvinyldienefluoride.

6. The chuck of claim 1, wherein the member is comprised of a compressible material.

7. The chuck of claim 6, wherein the compressible material is a fluoroelastomer.

8. The chuck of claim 6, wherein the compressible material has a Durometer hardness greater than or equal to 50.

9. The chuck of claim 1, wherein the member is positioned in an annular groove in the retainer.

10. The chuck of claim 1, wherein the member is positioned in a rectangular shaped groove in the retainer.

11. The chuck of claim 1, wherein the member is positioned in a square shaped groove in the retainer.

12. The chuck of claim 1, wherein the member is bonded to the retainer.

13. The chuck of claim 12, wherein the retainer is formed from a metal and coated with a fluoropolymer.

14. The chuck of claim 1 further comprising a second member forming a seal between the supporting body and the device side of the workpiece.

15. The chuck of claim 14, wherein the second member is positioned within a groove formed in the body for supporting the workpiece.

16. The chuck of claim 15, wherein the second member supports the workpiece such that the device side of the workpiece does not directly contact the support body.

17. The chuck of claim 14, wherein the first and second members are formed from an elastomeric material having a roughened surface.

18. The chuck of claim 1, wherein the body for supporting the workpiece comprises an inner surface and an outer peripheral shoulder.

19. The chuck of claim 18, wherein the workpiece is supported by the outer peripheral shoulder of the support body such that the device side of the workpiece is adjacent to the inner surface of the support body.

20. The chuck of claim 19, wherein the device side of the workpiece does not directly contact the inner surface of the support body.

21. A chuck for receiving and supporting a semiconductor workpiece with a device side, a bevel and a back side, the chuck comprising:

a body having a semiconductor workpiece support surface;

a retainer having an inner most portion removeably attached to the body and adapted to cover a peripheral portion of back side of the workpiece;

a first sealing member forming an inner most portion of the retainer, the first sealing member providing a seal between the retainer and the back side of the workpiece; and

a second sealing member providing a seal between the retainer and the body.

22. The chuck of claim 21, wherein the body has a step formed therein to center the semiconductor workpiece on the workpiece support surface.

23. The chuck of claim 21, wherein the body has an inner portion and an outer periphery and a first and second step is positioned at the outer periphery of the body.

24. The chuck of claim 23, wherein the first step is adjacent the inner portion of the body and extends beyond a surface of the inner portion.

25. The chuck of claim 24, wherein the workpiece has an exclusion zone and an inner portion and the device side of the workpiece has micro-electronic devices formed on the inner portion thereof, and when the workpiece is placed into the chuck, the exclusion zone of the workpiece rests on the first step and the inner portion of the device side of the workpiece is suspended above the inner portion of the body.

26. The chuck of claim 21, wherein the second sealing member is connected to the retainer.

27. The chuck of claim 26, wherein the second sealing member is positioned within an annular groove formed in the retainer.

28. The chuck of claim 21, wherein the second sealing member is connected to the body.

29. The chuck of claim 28, wherein the second sealing member is positioned within an annular groove formed in the body.

30. The chuck of claim 21, wherein the retainer has a diameter and the body has a diameter, the diameter of the retainer being less than the diameter of the body.

31. The chuck of claim 21, wherein the retainer comprises an engagement member and the body comprises a recess configured to accept the engagement member and engage the retainer to body.

32. The chuck of claim 21, wherein the body comprises an engagement member and the retainer comprises a recess configured to accept the engagement member and engage the retainer to the body.

33. The chuck of claim 21, wherein the workpiece and the first sealing member intersect to create an angle of about 90 degrees when the retainer is engaged to the body.

34. The chuck of claim 21, wherein the workpiece and the first sealing member intersect to create an angle greater than 90 degrees when the retainer is engaged to the body.

35. The chuck of claim 21, wherein the retainer includes a body portion having an inner edge and the seal between the retainer and the workpiece is positioned radially inwardly from the inner edge of the retainer body.

36. The chuck of claim 21, wherein the retainer covers the bevel and a peripheral portion of the back side of the workpiece when it is attached to the body.

37. The chuck of claim 21, wherein the retainer and the body each have an outer end configured to form a notch when the retainer is engaged to the body.

38. The chuck of claim 37, wherein the notch facilitates disengagement of the retainer from the body.

39. The chuck of claim 21, wherein the body is comprised of a material having a Durometer hardness, BDH, and the retainer is comprised of a material having a Durometer hardness, RDH, BDH being greater than RDH.

40. A chuck for supporting a workpiece having a device side, a bevel and a back side and preventing a process fluid from contacting the device side, bevel and a peripheral portion of the backside of the workpiece during a thinning process, the chuck comprising:

a body having a recess and a surface for supporting the workpiece;

a retaining ring having;

an engagement member configured to cooperate with the recess in the body and removeably attach the retaining ring to the body such that the retaining ring covers the bevel and the peripheral portion of the back side of the workpiece; and

an annular cavity with a compressible member disposed therein for forming a seal between the retaining ring and the workpiece, the seal being unobstructed from the process fluid during the thinning process.

41. The chuck of claim 40, wherein the retaining ring further comprises a second annular cavity with a second compressible member disposed therein for forming a seal between the retaining ring and the workpiece.

42. The chuck of claim 40, wherein the compressible member is comprised of a corrosion resistant material.

43. The chuck of claim 40, wherein the compressible member and the workpiece intersect to create an angle, the angle measuring approximately 90 degrees.

44. The chuck of claim 40, wherein the compressible member and the workpiece intersect to create an angle, the angle measuring greater than 90 degrees.

45. The chuck of claim 40, wherein upon forming the seal between the retaining ring and the workpiece, the compressible member is configured to facilitate distribution of process fluid at the seal.

46. An apparatus for use in supporting a semiconductor workpiece having a device side, a bevel and a back side during a process of thinning the workpiece, the apparatus comprising:

a body having an outer periphery and an inner surface for supporting the workpiece;

a retaining ring having a first compressible member for forming a seal between the retainer and the back side of the workpiece;

means for removeably attaching the retaining ring to the body such that the retaining ring protects the bevel and a peripheral portion of the back side of the workpiece during the thinning process; and

a second compressible member for forming a seal between the retainer and the outer periphery of the body.

47. The apparatus of claim 46, wherein the inner surface of the body for supporting the workpiece is comprised of an elastomeric compressible member.

48. The apparatus of claim 46, wherein the inner surface of the body for supporting the workpiece is comprised of a step formed in the body.

49. The apparatus of claim 46, wherein the second compressible member is comprised of an O-ring positioned in a groove located in the outer periphery of the body.

50. The apparatus of claim 46, wherein the body is formed from O-ring provides memory to the body.