Resettable latching MEMS shock sensor apparatus and method
First Claim
1. A micro-electromechanical shock sensor device, comprising:
- a moveable proof mass comprising a first mechanical latch and a first electrical contact; and
a pawl comprising a second mechanical latch, the second mechanical latch disposed at a latching distance from the first mechanical latch, the latching distance corresponding to a latching threshold shock level; and
a second electrical contact disposed at an electrical contact distance from the first electrical contact, the electrical contact distance corresponding to an electrical contact threshold shock level;
wherein the first mechanical latch moves toward the second mechanical latch and the first electrical contact moves toward the second electrical contact when the proof mass experiences a shock level in the direction of the latching threshold shock level; and
wherein the first mechanical latch engages with the second mechanical latch when the shock level reaches the latching threshold shock level; and
wherein the first electrical contact contacts with the second electrical contact when the shock level reaches the electrical contact threshold shock level.
1 Assignment
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Accused Products
Abstract
The Resettable Latching MEMS Shock Sensor provides the capability of recording external shock extremes without consuming electrical power. The device incorporates a shock sensitive suspended proof mass, spring-loaded contacts, latches, and actuators for device reset. The device can be designed, hardwired, or programmed to trigger at various shock levels. The device can be fabricated in a simple micromachining process that allows its size to be miniaturized for embedded and portable applications. During operation, the device consumes no quiescent power. The device can be configured to close a circuit, switch an interrupt signal, or switch some other electrical trigger signal between devices at the time of a shock extreme being reached, or it can be configured to latch and be polled at some time after the shock limit has occurred.
28 Citations
25 Claims
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1. A micro-electromechanical shock sensor device, comprising:
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a moveable proof mass comprising a first mechanical latch and a first electrical contact; and
a pawl comprising a second mechanical latch, the second mechanical latch disposed at a latching distance from the first mechanical latch, the latching distance corresponding to a latching threshold shock level; and
a second electrical contact disposed at an electrical contact distance from the first electrical contact, the electrical contact distance corresponding to an electrical contact threshold shock level;
wherein the first mechanical latch moves toward the second mechanical latch and the first electrical contact moves toward the second electrical contact when the proof mass experiences a shock level in the direction of the latching threshold shock level; and
wherein the first mechanical latch engages with the second mechanical latch when the shock level reaches the latching threshold shock level; and
wherein the first electrical contact contacts with the second electrical contact when the shock level reaches the electrical contact threshold shock level. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A micro-electromechanical shock sensor device, comprising:
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a first moveable proof mass comprising a first mechanical latch and a first electrical contact; and
a pawl comprising a second mechanical latch, the second mechanical latch disposed at a latching distance from the first mechanical latch, the latching distance corresponding to a latching threshold shock level; and
wherein the first mechanical latch moves toward the second mechanical latch when the proof mass experiences a shock level in the direction of the latching threshold shock level; and
wherein the first mechanical latch engages with the second mechanical latch when the shock level reaches the latching threshold shock level; and
a second moveable proof mass comprising a second electrical contact positioned so as to make an electrical contact with the first electrical contact after the first and second mechanical latches have latched.
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19. A micro-electromechanical shock sensor device, comprising:
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a moveable proof mass comprising a plurality of latches disposed at a plurality of latching distances from at least one holding latch, the plurality of latching distances corresponding to a plurality of latching shock levels, and a first electrical contact; and
at least one pawl comprising the at least one holding latch; and
a plurality of second electrical contacts disposed at a plurality of electrical contact distances from the first electrical contact, the plurality of electrical contact distances corresponding to a plurality of electrical contact shock levels;
wherein the plurality of latches moves toward the at least one holding latch and the first electrical contact moves toward the plurality of electrical contacts when the proof mass experiences a shock level in the direction of the plurality of contact shock levels; and
wherein at least one of the plurality of latches engages with at least one holding latch when the shock level reaches any of the plurality of latching shock levels; and
wherein the first electrical contact contacts with at least one of the plurality of electrical contacts when the shock level reaches the plurality of electrical contact shock levels. - View Dependent Claims (20, 21, 22, 23, 24)
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25. A method for sensing shock using a micro-electromechanical device, comprising the steps of:
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fabricating a micro-electromechanical shock sensor device, comprising;
a moveable proof mass comprising a first mechanical latch and a first electrical contact; and
a pawl comprising a second mechanical latch, the second mechanical latch disposed at a latching distance from the first mechanical latch, the latching distance corresponding to a latching threshold shock level; and
a second electrical contact disposed at an electrical contact distance from the first electrical contact, the electrical contact distance corresponding to an electrical contact threshold shock level;
wherein the first mechanical latch moves toward the second mechanical latch and the first electrical contact moves toward the second electrical contact when the proof mass experiences a shock level in the direction of the latching threshold shock level; and
wherein the first mechanical latch engages with the second mechanical latch when the shock level reaches the latching threshold shock level; and
wherein the first electrical contact contacts with the second electrical contact when the shock level reaches the electrical contact threshold shock level; and
installing the sensor in a location in which shock is desired to be monitored.
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Specification