Articulated MEMs structures

• US 20060222312A1
• Filed: 02/15/2006
• Published: 10/05/2006
• Est. Priority Date: 02/16/2005
• Status: Active Grant

• Current Assignee: Lumentum Operations, LLC (Lumentum Holdings Inc.)
• Original Assignee: Viavi Solutions, Inc. (Lumentum Holdings Inc.)
• Inventors: Miller, John Michael, Keyworth, Barrie, Ducellier, Thomas, McKinnon, Graham, Mala, Mohiuddin
• Granted Patent: US 7,432,629 B2
• Time in Patent Office: Days
• US Class Current: 385/147
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 6/3512 the optical element being reflective, e.g. mirror
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C

Abstract

The present invention relates to an articulated micro-electro-mechanical (MEMS) device, which is constructed in such a way as to enable several of the devices to be closely packed together, i.e. high fill factor, for redirecting specific wavelengths of light from a dispersed optical signal to different output ports. The articulated MEMS device includes multiple pivotally connected sections that are pivotable about two perpendicular axes for limiting the amount of dynamic cross-talk as the device is rotated between different positions.

Claims

1. An articulated micro-electro-mechanical device suspended above a substrate comprising:

a main platform having a longitudinal axis pivotable about first and second perpendicular axes;

a first moveable actuator, one end of which is pivotally connected to the main platform, for pivoting the main platform about the first axis;

a first actuating means for moving the first moveable actuator, thereby pivoting the main platform about the first axis; and

a second actuating means for pivoting the main platform about the second axis.

2. The device according to claim 1, further comprising:

a first torsional hinge pivotally connecting the main platform to the first moveable actuator defining a first spring constant relating to rotation about the second axis;

a second torsional hinge pivotally connecting the main platform to the substrate defining a second spring constant relating to rotation about the second axis; and

a third torsional hinge pivotally connecting the moveable actuator to the substrate defining a third spring constant relating to rotation about the second axis.

3. The device according to claim 2, wherein the first spring constant is greater than the second and third spring constants, whereby the main platform and the first moveable actuator will rotate about the second axis together.

4. The device according to claim 2, wherein the third spring constant is greater than the first and second spring constants, whereby the main platform will rotate about the second axis substantially independently of the first moveable actuator.

5. The device according to claim 2, wherein the first torsional hinge comprises a serpentine torsional bar extending between a first end of the main platform and a first end of the first actuator;

wherein the second torsional hinge comprises a serpentine torsional bar extending between a second end of the main platform and a first anchor on the substrate; and

wherein the third torsional hinge comprises a serpentine torsional bar extending between a second end of the first actuator and a second anchor on the substrate.

6. The device according to claim 2, wherein at least one of the first, second and third torsional hinges comprises a serpentine torsional bar with first folds extending in a first direction facilitating rotation about the first axis, and second folds extending in a second direction facilitating rotation about the second axis.

7. The device according to claim 2, wherein at least one of the first, second and third torsional hinges comprises first and second serpentine torsional bars with folds extending in a first direction facilitating rotation about the first axis, and a third serpentine torsional bar with folds extending in a second direction facilitating rotation about the second axis.

8. The device according to claim 2, wherein at least one of the first, second and third torsional hinges comprises first and second serpentine torsional bars, one on each side of the longitudinal axis of the main platform.

9. The device according to claim 1, wherein the first actuator comprises piston means moveable towards and away from the substrate for raising and lowering one end of the main platform, thereby rotating the main platform about the first axis.

10. The device according to claim 9, wherein the piston means comprises a platform suspended by a plurality of spaced apart torsional hinges.

11. The device according to claim 2, wherein the main platform is comprised of first and second planar sections separated by a support.

12. The device according to claim 11, wherein the second torsional hinge comprises two serpentine torsional bars extending between the support and the substrate having ends thereof fixed along a line perpendicular to the longitudinal axis of the main platform.

13. The device according to claim 12, wherein the second torsional hinge further comprises a torsional bar extending along the longitudinal axis of the main platform.

14. The device according to claim 11, wherein the second torsional hinge comprises:

a first pair of serpentine torsional bars, each one extending from an anchor post, which extends from the substrate through an opening in the main platform, to a gimbal ring, which at least partially surrounds the first pair of serpentine torsional bars; and

a second pair of serpentine torsional bars, one of the second pair of serpentine torsional bars extending from the gimbal ring to the first planar section, the other of the second pair of serpentine torsional bars extending from the gimbal ring to the second planar section.

15. The device according to claim 1, further comprising:

a second moveable actuator, one end of which is pivotally connected to the main platform at an opposite end to the first moveable actuator.

16. The device according to claim 15, further comprising first and second fulcrums extending from the substrate pivotally supporting the first and second moveable actuators, respectively.

17. The device according to claim 1, wherein the first actuator comprises first attraction/repulsion means above or beneath one end of the first actuator for rotating the first actuator about an axis parallel to the first axis, thereby rotating the main platform about the first axis.

18. The device according to claim 1, wherein the second actuator comprises second attraction/repulsion means above or beneath the main platform on one side of the longitudinal axis thereof for rotating the main platform about the second axis.

19. The device according to claim 1, further comprising a motion restrictor extending from the substrate for limiting motion of the main platform.

20. The device according to claim 19, wherein the motion restrictor comprises a rod extending upwardly from the substrate into an opening formed in the main platform.