×

SYSTEM AND METHOD FOR DETECTING FLOW IN A MASS FLOW CONTROLLER

  • US 20060223204A1
  • Filed: 06/01/2006
  • Published: 10/05/2006
  • Est. Priority Date: 08/30/2001
  • Status: Abandoned Application
First Claim
Patent Images

1. A method, comprising:

  • oscillating a gate in an ultrasonic mass flow controller; and

    monitoring the gate to detect gate operability.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×