SYSTEM AND METHOD FOR DETECTING FLOW IN A MASS FLOW CONTROLLER
First Claim
1. A method, comprising:
- oscillating a gate in an ultrasonic mass flow controller; and
monitoring the gate to detect gate operability.
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Abstract
Systems and methods are provided for detecting flow in a mass flow controller (MFC). The position of a gate in the MFC is sensed or otherwise determined to monitor flow through the MFC and to immediately or nearly immediately detect a flow failure. In one embodiment of the present invention, a novel MFC is provided. The MFC includes an orifice, a mass flow control gate, an actuator and a gate position sensor. The actuator moves the control gate to control flow through the orifice. The gate position sensor determines the gate position and/or gate movement to monitor flow and immediately or nearly immediately detect a flow failure. According to one embodiment of the present invention, the gate position sensor includes a transmitter for transmitting a signal and a receiver for receiving the signal such that the receiver provides an indication of the position of the gate based on the signal received. Other embodiments of the gate position sensor are described herein, as well as systems and methods that incorporate the novel MFC within a semiconductor manufacturing process.
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Citations
21 Claims
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1. A method, comprising:
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oscillating a gate in an ultrasonic mass flow controller; and
monitoring the gate to detect gate operability. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method, comprising:
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providing a mass flow controller in an ultrasonic mass flow line;
oscillating a gate in the mass flow controller at a desired frequency between an opened position and a closed position in order to control flow in the mass flow line; and
monitoring gate movement. - View Dependent Claims (10, 11, 12)
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13. A semiconductor processing method for delivering a semiconductor gas, comprising:
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providing a mass flow controller in an ultrasonic semiconductor gas flow line;
oscillating a gate in the mass flow controller between an opened position and a closed position to control semiconductor gas flow; and
monitoring operation of the gate by transmitting a signal, receiving the signal, and determining whether the gate is opened or closed based on the signal received. - View Dependent Claims (14, 15, 16, 17)
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18. A method for detecting a gas flow failure in a semiconductor manufacturing process, comprising:
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providing a flow controller in a semiconductor gas inflow line;
oscillating a gate in the flow controller to control flow; and
monitoring the gate to detect gate operability. - View Dependent Claims (19, 20, 21)
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Specification