Ti oxide film having visible light-responsive photocatalytic activites and process for its production
First Claim
1. A Ti oxide film formed on a substrate, characterized in that when a voltage is applied to the Ti oxide film while the Ti oxide film is irradiated with light of a xenon lamp having a luminance of 100 mW/cm2 and having ultraviolet light of less than 400 nm cutoff, the electric current value is at least 1,000 times the electric current value when the same voltage as said voltage is applied to the Ti oxide film in a dark place.
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Accused Products
Abstract
To provide a visible light responsible Ti oxide film which has hydrophilicity and antifogging property and is excellent in transparency and which has an ability to decompose gas by UV radiation, and a process for its production, as well as a Ti oxide film-coated substrate.
A Ti oxide film formed on a substrate, characterized in that when a voltage is applied to the Ti oxide film while the Ti oxide film is irradiated with light of a xenon lamp having a luminance of 100 mW/cm2 and having ultraviolet light of less than 400 nm cutoff, the electric current value is at least 1,000 times the electric current value when the same voltage as said voltage is applied to the Ti oxide film in a dark place.
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Citations
24 Claims
- 1. A Ti oxide film formed on a substrate, characterized in that when a voltage is applied to the Ti oxide film while the Ti oxide film is irradiated with light of a xenon lamp having a luminance of 100 mW/cm2 and having ultraviolet light of less than 400 nm cutoff, the electric current value is at least 1,000 times the electric current value when the same voltage as said voltage is applied to the Ti oxide film in a dark place.
- 11. A Ti oxide film formed on a substrate, characterized in that the Ti oxide film has a crystal structure of anatase type, the surface layer of the Ti oxide film is TiO2, the interior of the Ti oxide film is TiOx, and the total of contents of titanium, nitrogen and oxygen in the Ti oxide film is at least 99.0 mass %.
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22. A process for producing a Ti oxide film which comprises forming on a substrate a Ti oxide film by a sputtering method in an atmosphere of at least one gas selected from the group consisting of a rare gas, a nitrogen-containing gas and an oxygen-containing gas by means of a sputtering target composed of TiOx (1<
- x<
2) wherein the total of contents of titanium and oxygen is at least 99.0 mass %, and then firing the Ti oxide film in the presence of oxygen at a temperature of from 400 to 750°
C. for from 1 to 28 minutes. - View Dependent Claims (23)
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24. A process for producing a Ti oxide film which comprises forming a Ti oxide film on a substrate by a sputtering method in an atmosphere of at least one gas selected from the group consisting of a rare gas, a nitrogen-containing gas and an oxygen-containing gas by means of a sputtering target composed of TiOx (1<
- x<
2) wherein the total of contents of titanium and oxygen is at least 99.0 mass %, then forming a Si oxide film by a sputtering method under a deposition pressure of at least 1.0 Pa, followed by firing in the presence of oxygen at a temperature of from 400 to 750°
C. for from 1 to 28 minutes.
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Specification