Power semiconductor device and method therefor
3 Assignments
0 Petitions
Accused Products
Abstract
A power transistor includes a plurality of transistor cells. Each transistor cell has a first electrode coupled to a first electrode interconnection region overlying a first major surface, a control electrode coupled to a control electrode interconnection region overlying the first major surface, and a second electrode coupled to a second electrode interconnection region overlying a second major surface. Each transistor cell has an approximately constant doping concentration in the channel region. A dielectric platform is used as an edge termination of an epitaxial layer to maintain substantially planar equipotential lines therein. The power transistor finds particular utility in radio frequency applications operating at a frequency greater than 500 megahertz and dissipating more than 5 watts of power. The semiconductor die and package are designed so that the power transistor can efficiently operate under such severe conditions.
87 Citations
192 Claims
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1-42. -42. (canceled)
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43. A semiconductor device comprising:
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a semiconductor die having an active area including a plurality of transistor cells, each cell including a source region, a gate and a drain region;
a gate interconnect coupled to the gates of the cells, said gate interconnect being located adjacent a periphery of the die, wherein the gate interconnect comprises metal; and
a shielding plate between at least a portion of the gate interconnect and the drain region of at least one transistor cell of the plurality of transistor cells to reduce gate to drain capacitance, wherein the shielding plate is coupled to the source region of a first transistor cell of the plurality of transistor cells. - View Dependent Claims (44, 45)
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46. A semiconductor device comprising:
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a semiconductor die comprising a plurality of mesh-connected transistor cells wherein each cell has a source region, a gate and a drain region;
the source regions of the cells are located adjacent a first surface of the die;
the gates of the cells are located adjacent the first surface of the die;
a drain electrode coupled to the drain regions of the cells and adjacent to a second surface of the die, wherein the second surface is opposite the first surface;
a conductive pathway extending radially outwardly from the gates of the cells to provide control signals to the gates of the cells; and
a shielding plate located substantially between the conductive pathway and the drain regions of the cells to reduce gate to drain capacitance, wherein the shielding plate is coupled to the source region of a first transistor cell of the Plurality of mesh-connected transistor cells. - View Dependent Claims (47, 48)
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49-138. -138. (canceled)
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139. A semiconductor device, comprising:
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a semiconductor material;
an active area in the semiconductor material;
a transistor having a gate, a drain region, a source region in the active area, a source electrode coupled to the source region, and a drain electrode;
a first region of a first conductivity type extending from a first surface of the semiconductor material into the semiconductor material, wherein the first region is contiguous around the periphery of the active area; and
a layer of conductive material over the first surface of the semiconductor material and adjacent to a portion of the gate of the transistor to reduce gate to drain capacitance, wherein the layer of conductive material is coupled to the first region and electrically coupled to the source electrode of the transistor. - View Dependent Claims (140, 141, 142, 143)
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144. A semiconductor device, comprising:
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a semiconductor material having a first surface and a second surface opposite the first surface;
a transistor having a drain region in the semiconductor material, a source region in the semiconductor material, a channel region in the semiconductor material, and a gate over the first surface of the semiconductor material, wherein the gate length of the transistor is formed non-photolithographically, wherein the gate comprises an electrically conductive material, and wherein the gate length of the transistor is approximately equal to the deposition thickness of the layer of electrically conductive material;
a drain interconnect coupled to the drain region; and
a source interconnect coupled to the source region and separated from the gate, wherein the gate is a contiguous structure surrounding at least a portion of the source interconnect. - View Dependent Claims (145, 146, 147, 148)
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149. A semiconductor device, comprising:
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a semiconductor material;
an active area;
a transistor having a gate over a first surface of the semiconductor material, a source region in the active area, a drain region, a source electrode coupled to the source region, and a drain electrode coupled to the drain region;
a first layer of conductive material over the first surface of the semiconductor material and adjacent to a portion of the gate of the transistor to reduce gate to drain capacitance; and
a dielectric structure extending at least about four microns from the first surface of the semiconductor material into the semiconductor material, wherein at least a portion of the first layer of conductive material is over the dielectric structure. - View Dependent Claims (150, 151, 152, 153, 154, 155, 156, 157)
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158. A semiconductor device, comprising:
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a semiconductor material;
a first region of a first conductivity type in the semiconductor material;
a second region of a second conductivity type in the semiconductor material adjacent to the first region, wherein the second region has a higher doping concentration than the semiconductor material, wherein the first region and the second region extend from a top surface of the semiconductor material into the semiconductor material, and wherein a depth of the second region relative to the top surface of the semiconductor material is approximately equal to a depth of the first region;
a third region of the second conductivity type extending from the top surface of the semiconductor material into the semiconductor material;
a conductive material over the first region; and
a dielectric structure in the semiconductor material and adjacent to an area that includes the first region, wherein the dielectric structure extends at least about four microns from the top surface of the semiconductor material into the semiconductor material. - View Dependent Claims (159, 160, 161, 162, 163, 164, 165, 166, 167, 168, 169, 170, 171, 172, 173, 174, 175, 176, 177)
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178. A semiconductor device, comprising:
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a semiconductor material;
an active area in the semiconductor material;
a first region of a first conductivity type in the active area extending from a first surface of the semiconductor material into the semiconductor material;
a second region of a second conductivity type in the active area extending from the first surface of the semiconductor material into the semiconductor material;
a third region of the second conductivity type in the active area extending from the first surface of the semiconductor material into the semiconductor material;
a fourth region of the first conductivity type in the active area extending from the first surface of the semiconductor material into the semiconductor material; and
a dielectric structure extending at least about four microns from a surface of the semiconductor material into the semiconductor material, wherein the dielectric structure is a structure surrounding the active area and wherein the fourth region is contiguous around the periphery of the active area and adjacent to the dielectric structure. - View Dependent Claims (179, 180, 181, 182, 183, 184)
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185. A semiconductor device, comprising:
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a semiconductor material;
a vertical transistor having a gate, a drain region, a source region, and a channel region, wherein the channel region of the vertical transistor is in the semiconductor material and has a substantially constant doping concentration; and
a dielectric structure extending from a first surface of the semiconductor material into the semiconductor material at least about 4 microns. - View Dependent Claims (186, 187, 188, 189, 190, 191, 192)
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Specification