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Lithographic apparatus and device manufacturing method utilizing a blazing portion of a contrast device

  • US 20060227069A1
  • Filed: 04/08/2005
  • Published: 10/12/2006
  • Est. Priority Date: 04/08/2005
  • Status: Active Grant
First Claim
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1. A apparatus, comprising:

  • an illumination system that conditions a radiation beam;

    an array of individually controllable elements that modulates the beam, at least a group of elements in the array of individually controllable elements being tilted to at least a same tilt direction with a same tilt sign; and

    a projection system that projects the modulated beam onto a target portion of an object, the projection system including an aperture that filters out undesired diffraction orders of the modulated beam.

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