Reduction of MEMS mirror edge diffraction in a wavelength selective switch using servo-based multi-axes rotation

• US 20060228071A1
• Filed: 12/22/2005
• Published: 10/12/2006
• Est. Priority Date: 04/11/2005
• Status: Active Grant

• Current Assignee: Capella Photonics, Inc. (Nokia Corporation)
• Original Assignee: Capella Photonics, Inc. (Nokia Corporation)
• Inventors: Davis, Joseph E., Tremaine, Brian P.
• Granted Patent: US 7,346,234 B2
• Time in Patent Office: Days
• US Class Current: 385/16
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 27/095 Refractive optical elements
• CPC Class Codes: G02B 6/29311 Diffractive element operating in transmission
• CPC Class Codes: G02B 6/29383 Adding and dropping
• CPC Class Codes: G02B 6/352 the reflective optical element having a shaped reflective surface, e.g. a reflective element comprising several reflective surfaces or facets that function together
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/3588 of the processed beams, i.e. controlling during switching of orientation, alignment, or beam propagation properties such as intensity, size or shape
• CPC Class Codes: G02B 6/3594 Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
• CPC Class Codes: G02B 6/4215 the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers G02B6/4246 takes precedence

Abstract

Effects of diffraction of a spectral beam from an edge of the micromirrors are reduced in order to optimize the passband in a wavelength selective switch. The effects of diffraction on the pass band may be reduced by appropriate modification of the edges of the micromirrors, by modification of the input and/or output ports to allow for attenuation by rotation of the micromirror about the switching axis, by using rotation of the micromirror about both the attenuation axis and the switching axis to achieve the desired level of attenuation, by inserting an aperture at a focal plane or external to the device to reduce the magnitude of the micromirror edge diffraction transmitted to any or all output ports, or by appropriate filtering of angular frequencies with a diffraction grating used to separate a multi-channel optical signal into constituent spectral beams.

Claims

1. Optical apparatus for switching multi-channel optical signals having spectral channels of different wavelengths, comprising:

a plurality of input and output ports for optical signals having one or more of said spectral channels;

an optical beam exapander and relay system adapted to receive the optical signals from one or more of the input ports, the anamorphic system being formed to convert the optical signals to spectral beams having a predetermined elongated beam profile;

a wavelength separator for spatially separating the spectral beams into constituent spectral channels; and

an array of channel micromirrors, each channel micromirror of the array being positioned to receive one of said constituent spectral channels, the micromirrors being rotatable about a switching axis to switch said one spectral channel to a selected output port;

wherein each channel micromirror is rotatable about an attenuation axis to vary the coupling of the switched spectral channel to the selected output port to control a power level of the spectral channel output at such selected port, wherein the attenuation axis is different from the switching axis,

wherein the channel micromirrors and/or the input or output ports and/or wavelength separator are configured to reduce a non-uniform attenuation of a passband of the apparatus due to diffraction of a spectral beam from an edge of one or more of the micromirrors, wherein the edge is substantially parallel to the attenuation axis.

2. The apparatus of claim 1, wherein the edge is configured to reduce effects of diffraction of a spectral beam reflected from the edge.

3. The apparatus of claim 2 wherein at least a portion of the edge has a vector component along the switching axis.

4. The apparatus of claim 3 wherein a portion of the edge has a sawtooth configuration.

5. The apparatus of claim 4 wherein the sawtooth configuration is characterized by sawtooth angle of between about 5 degrees and about 85 degrees relative to the attenuation axis.

6. The apparatus of claim 2 wherein the edge includes one or more features that protrude above a plane of the micromirror surface and/or are submerged below the plane of the micromirror surface.

7. The apparatus of claim 6 wherein each of the features protrudes above (or are submerged below) the plane of the micromirror surface by a distance approximately equal to one-fourth of a wavelength of light that is likely to strike the mirror or an amount that causes destructive optical interference due to the presence of the features and the micromirror surface in such a way so as to eliminate or diminish diffraction from the edge region of the micromirror surface.

8. The apparatus of claim 2 wherein the edge includes a grey scale mask characterized by a reflectivity that is lower in regions closer to a terminus of the edge than in regions further from the terminus.

9. The apparatus of claim 8 wherein the edge includes a phase mask having a first reflecting region and a second reflecting region, wherein light reflected from the first and reflecting regions experience different phase shift distributions upon reflection such that light reflecting from the first and second reflecting regions tend to cancel.

10. The apparatus of claim 2 wherein the edge is configured to increase a solid angle of scattering of light.

11. The apparatus of claim 10 wherein the edge is characterized by a rounded or shaped profile.

12. The apparatus of claim 1 wherein the input and/or output ports are sufficiently far apart that the effects of diffraction of a spectral beam reflected from the edge are reduced by rotating the micromirror partly about the switching axis and partly about the attenuation axis.

13. The apparatus of claim 1 wherein a direction of rotation of the channel micromirrors (clockwise versus counterclockwise) about the attenuation axis is chosen to minimize edge diffraction effects at an attenuated state.

14. The apparatus of claim 1, further comprising a spatial filter having an aperture characterized by a size, location, and shape chosen to reduce the effects of a non-uniform attenuation of the passband due diffraction of a spectral beam reflected from the edge.

15. The apparatus of claim 14, wherein the spatial filter includes first and second relay lenses, wherein the aperture is located at a fourier transform plane between the first and second relay lenses.

16. The apparatus of claim 15, wherein the input ports and/or output ports include a port mirror array optically coupled to the beam expander and relay system, wherein the spatial filter is located along an optical path between the port mirror array and the beam expander and relay system.

17. The apparatus of the claim 16 wherein the input port and output ports include an express port, wherein the spatial filter is optically coupled to the express port.

18. The apparatus of claim 16 wherein the spatial filter is optically coupled to any or all output ports.

19. The apparatus of claim 18 wherein the first relay lens is in the form of a first array of two or more lenslets and wherein the second relay lens is in the form of a second array of two or more lenslets, wherein each lenslet in the first array is optically coupled to a corresponding output port, wherein each lenslet in the second array is optically coupled to a corresponding lenslet in the first array, wherein the spatial filter includes an array of apertures each aperture located at a fourier transform plane of the corresponding lenslets in the first and second lenslet arrays.

20. The apparatus of claim 15, wherein the input and output ports further include a fiber collimator array optically coupled to a port mirror array, wherein the port mirror array is optically coupled to the beam expander and relay system, wherein the spatial filter is located along an optical path between the fiber collimator and the port mirror array.

21. The apparatus of claim 15, further comprising:

a port mirror array optically coupled to the beam expander and relay system and the input and output ports;

one or more multimode mode optical fibers, wherein each single mode optical fiber has a first end and a second end, the first end being optically coupled to a corresponding output port; and

one or more collimator lens pairs having first and second collimator lenses, each collimator lens pair being optically coupled to the second end of a corresponding one of the one or more multimode optical fibers;

wherein the spatial filter is located between the first and second collimator lenses.

22. The apparatus of claim 1, wherein a combination of rotations of the channel micromirror (clockwise versus counterclockwise) about the switching and attenuation axes, respectively, are chosen to minimize edge diffraction effects at an attenuated state.

23. The apparatus of claim 1 wherein the optics include an anamorphic system configured to convert the optical signals to spectral beams having a predetermined elongated beam profile

24. The apparatus of claim 1 wherein each of the channel micromirrors has an elongated shape corresponding to said beam profile, and

25. The apparatus of claim 1, further comprising an array of biaxial port micromirrors for maintaining optimum coupling efficiency into each port and maintaining optimum ITU grid alignment.

26. The apparatus of claim 1, wherein the wavelength separator is a diffraction grating, wherein the grating is configured to filter out or reduce higher angular frequencies that contribute to non-uniform attenuation of a passband.

27. The apparatus of claim 1, further comprising means for implementing hitless switching of the spectral channels.

28. The apparatus of claim 25, wherein a combination of rotations of the port mirrors about one or both of their axes of rotation is chosen to minimize edge diffraction effects at an attenuated state.

29. A method of optimizing passband in optical apparatus for switching optical signals of a multi-channel optical signal having constituent spectral channels of different wavelengths between input and output ports, comprising:

spatially separating said multi-channel optical signal from one of the input ports into spectral beams corresponding to the constituent spectral channels;

focusing the separated spectral channels onto corresponding channel micromirrors that switch the focused spectral channels to one or more selected output ports, the channel micromirrors having an elongated shape and size that is compatible with the shape and size of said elongated spots, said focusing comprising aligning said elongated spots to be centered on said corresponding micromirrors; and

reducing non-uniform attenuation of a passband of the optical apparatus due to effects of diffraction of a spectral beam reflected from an edge of one or more of the micromirrors.

30. The method of claim 29 wherein reducing non-uniform attenuation of a passband of the optical apparatus due to effects of diffraction includes rotating one or more of the micromirrors partly about the attenuation axis and partly about a switching axis that is different from the attenuation axis.

31. The method of claim 29, wherein reducing non-uniform attenuation of a passband of the optical apparatus due to effects of diffraction includes configuring an edge of one or more of the micromirrors to reduce effects of diffraction of a spectral beam reflected from the edge.

32. The method of claim 31 wherein at least a portion of the edge has a vector component along the switching axis.

33. The method of claim 32 wherein a portion of the edge has a sawtooth configuration.

34. The method of claim 33 wherein the sawtooth configuration is characterized by sawtooth angle of between about 5 degrees and about 85 degrees relative to the attenuation axis.

35. The method of claim 34 wherein the edge includes one or more features that protrude above and/or are submerged below a plane of the micromirror surface.

36. The method of claim 35 wherein each of the features protrudes above and/or below the plane of the micromirror surface by a distance approximately equal to one-fourth of a wavelength of light that is likely to strike the mirror or an amount that causes optical interference due to the presence of the features and the micromirror surface so that the edge diffraction effects on the passband are eliminated or diminished.

37. The method of claim 31 wherein the edge includes a grey scale mask characterized by a reflectivity that is lower in regions closer to a terminus of the edge than in regions further from the terminus.

38. The method of claim 31 wherein the edge includes a phase mask having a first reflecting region and a second reflecting region, wherein light reflected from the first and reflecting regions experience different phase shifts upon reflection such that light reflecting from the first and second reflecting regions tend to cancel.

39. The method of claim 31 wherein configuring the edge includes increasing a solid angle of diffraction of light at the edge.

40. The method of claim 39 wherein the edge is characterized by a rounded profile.

41. The method of claim 29, wherein reducing non-uniform attenuation of a passband of the optical apparatus due to effects of diffraction includes spatially filtering one or more of the spectral beams with an aperture characterized by a size, location, and shape, wherein the size, location, and shape of the aperture are chosen such that the aperture reduces non-uniform attenuation of a passband of the optical apparatus due to the effects of diffraction of a spectral beam reflected from the edge.

42. The method of claim 41, wherein spatially filtering one or more of the spectral beams includes the use of first and second relay lenses, wherein the aperture is located at a focal plane between the first and second relay lenses.

43. The method of claim 42, wherein the input ports and/or output ports include a port mirror array optically coupled to the beam expander and relay system, wherein the spatial filter is located along an optical path between the port mirror array and the beam expander and relay system.

44. The method of the claim 43 wherein the input port and output ports include an express port, wherein the spatial filter is optically coupled to the express port.

45. The method of claim 43 wherein the spatial filter is optically coupled to an output port.

46. The method of claim 45 wherein the first relay lens is in the form of a first array of two or more lenslets and wherein the second relay lens is in the form of a second array of two or more lenslets, wherein each lenslet in the first array is optically coupled to a corresponding output port, wherein each lenslet in the second array is optically coupled to a corresponding lenslet in the first array, wherein the spatial filter includes an array of apertures each aperture located at a fourier plane of the corresponding lenslets in the first and second lenslet arrays.

47. The method of claim 42, wherein the input and output ports further include a fiber collimator array optically coupled to a port mirror array, wherein the port mirror array is optically coupled to the beam expander and relay system, wherein the spatial filter is located along an optical path between the fiber collimator and the port mirror array.

48. The method of claim 41, further comprising:

a port mirror array optically coupled to the beam expander and relay system and the input and output ports;

one or more multimode mode optical fibers, wherein each single mode optical fiber has a first end and a second end, the first end being optically coupled to a corresponding output port; and

one or more collimator lens pairs having first and second collimator lenses, each collimator lens pair being optically coupled to the second end of a corresponding one of the one or more multimode optical fibers;

wherein the spatial filter is located between the first and second collimator lenses.

49. The method of claim 29 wherein spatially separating said multi-channel optical signal into spectral beams corresponding to the constituent spectral channels includes converting the optical signals from the one or more input ports into spectral beams having a predetermined elongated beam profile by anamorphically expanding the beams in orthogonal directions;

and spatially separating said spectral beams into constituent spectral channels.

50. The method of claim 29 wherein reducing non-uniform attenuation of a passband of the optical apparatus due to effects of diffraction includes the use of a diffraction grating to spatially separate the multi-channel optical signal from one of the input ports into spectral beams corresponding to the constituent spectral channels, wherein the diffraction grating is configured to filter out or reduce higher angular frequencies that contribute to non-uniform attenuation of a passband.

51. The method of claim 42 wherein reducing non-uniform attenuation of a passband of the optical apparatus due to effects of diffraction includes rotating one or more of the port mirrors partly about a first axis and/or partly about a second axis that is different from the first axis.