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Plasma uniformity control by gas diffuser curvature

  • US 20060228496A1
  • Filed: 07/01/2005
  • Published: 10/12/2006
  • Est. Priority Date: 05/12/2004
  • Status: Active Grant
First Claim
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1. A gas distribution plate assembly for a plasma processing chamber, comprising:

  • a diffuser plate having an upstream side and a downstream side, wherein the downstream side has a curvature that is substantially concave.

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