Tear-resistant thin film methods of fabrication
First Claim
3. A thin film device having optimum tear resistance, the device comprising a thin film first layer of a material, the first layer having first and second planar sides, the layer having an edge, the first side being formed with a plurality of spaced-apart ribs which are inclined at a first angle with respect to the edge, a thin film second layer having first and second planar sides, the first side of the second layer being bonded to the second side of the first layer, a thin film third layer having first and second planar sides, the first side of the third layer being bonded to the second side of the second layer, and the second side of the third layer being formed with a plurality of spaced-apart struts which are inclined a second angle with respect to the edge.
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Abstract
A thin film device and fabrication method providing optimum tear resistance. A thin film layer is formed with a first and second of rows of holes. The holes in each row are spaced-apart along an axis which extends along an edge of the layer. The holes in one row are in overlapping relationship with adjacent holes in the other row. The holes have a diameter which is sufficiently large so that an imaginary line extending perpendicular from any location along the edge will intersect at least one hole, thus preventing further propagation of any tears or cracks which start from the edge.
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Citations
7 Claims
- 3. A thin film device having optimum tear resistance, the device comprising a thin film first layer of a material, the first layer having first and second planar sides, the layer having an edge, the first side being formed with a plurality of spaced-apart ribs which are inclined at a first angle with respect to the edge, a thin film second layer having first and second planar sides, the first side of the second layer being bonded to the second side of the first layer, a thin film third layer having first and second planar sides, the first side of the third layer being bonded to the second side of the second layer, and the second side of the third layer being formed with a plurality of spaced-apart struts which are inclined a second angle with respect to the edge.
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5-1. A method as in claim 5 in which a shape memory alloy is provided as the material.
- 6. A method of fabricating a thin film device with improved tear resistance comprising the steps of providing a thin film first layer of a material having first and second planar sides and with the layer having an edge, forming the first side being with a plurality of spaced-apart ribs which are inclined at a first angle with respect to the edge, forming a thin film second layer having first and second planar sides, bonding the first side of the second layer to the second side of the first layer, forming a thin film third layer having first and second planar sides, bonding the first side of the third layer to the second side of the second layer, and forming the second side of the third layer with a plurality of spaced-apart struts which are inclined a second angle with respect to the edge.
Specification