Optical sensor based on resonant porous silicon structures
First Claim
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1. A sensor, comprising:
- at least one high refractive index layer; and
at least one low refractive index layer coupled to the high refractive index layer.
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Abstract
A sensor includes at least one high refractive index layer; and at least one low refractive index layer coupled to the high refractive index layer.
34 Citations
21 Claims
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1. A sensor, comprising:
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at least one high refractive index layer; and
at least one low refractive index layer coupled to the high refractive index layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of detecting at least one target species, the method comprising:
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binding the at least one target species to a waveguide layer;
coupling light through the waveguide layer, the waveguide layer including at least one porous silicon layer having greater porosity than at least one second porous silicon layer;
coupling light through the at least one second porous silicon layer; and
identifying the at least one target species based on at least one of the coupling steps. - View Dependent Claims (13, 14, 15, 16)
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17. A system for detecting at least one target species, the system comprising:
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means for binding the at least one target species to a waveguide layer;
means for coupling light through the waveguide layer; and
means for identifying the at least one target species. - View Dependent Claims (18, 19, 20, 21)
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Specification