SINGLE IC-CHIP DESIGN ON WAFER WITH AN EMBEDDED SENSOR UTILIZING RF CAPABILITIES TO ENABLE REAL-TIME DATA TRANSMISSION
First Claim
1. A method for real-time monitoring process conditions of a semiconductor wafer processing operation comprising the steps of:
- a) providing a semiconductor wafer subject to processing in a wafer processing tool with one or more embedded sensor devices;
b) receiving wireless electromagnetic signals to activate an embedded sensor device for generating sensory data, said signals further activating a transmitter device provided in said wafer to wirelessly transmit said sensory data generated from said activated embedded sensor device; and
, c) transmitting electromagnetic signals comprising said sensory data to a control device for controlling processing conditions of the process tool based upon the received sensory data.
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Accused Products
Abstract
An apparatus and method for real-time monitoring process conditions of a semiconductor wafer processing operation. A semiconductor wafer subject to processing in a wafer processing tool is embedded with one or more sensor devices. In response to receipt of wireless electromagnetic signals, the embedded sensor devices are activated for generating sensory data. The electromagnetic signals are further utilized to activate a transmitter device provided in the wafer to wirelessly transmit the sensory data generated from the activated embedded sensor device. The transmitted electromagnetic signals comprising the sensory data are communicated to a control device for controlling processing conditions of the process tool based upon the received sensory data.
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Citations
26 Claims
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1. A method for real-time monitoring process conditions of a semiconductor wafer processing operation comprising the steps of:
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a) providing a semiconductor wafer subject to processing in a wafer processing tool with one or more embedded sensor devices;
b) receiving wireless electromagnetic signals to activate an embedded sensor device for generating sensory data, said signals further activating a transmitter device provided in said wafer to wirelessly transmit said sensory data generated from said activated embedded sensor device; and
,c) transmitting electromagnetic signals comprising said sensory data to a control device for controlling processing conditions of the process tool based upon the received sensory data. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An apparatus for real-time monitoring of process conditions of a semiconductor wafer processing operation comprising:
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a wafer processing tool adapted to receive and process a semiconductor wafer therein, said semiconductor wafer including one or more sensor devices embedded therein;
a means for generating wireless electromagnetic signals for receipt by said embedded one or more sensor devices, said embedded sensor device generating sensory data in response to said electromagnetic signals, a transmitter means provided in said wafer for transmitting said sensory data;
a receiver means located externally from said wafer processing tool for receiving said transmitted sensory data; and
,a means for controlling processing conditions of the wafer process tool based upon the received sensory data. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A system for controlling processing condition parameters of a wafer processing chamber comprising:
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a means for generating RF signals for receipt by a monitoring wafer positioned within said chamber, said monitoring wafer having one or more embedded sensor circuits, each embedded sensor circuit comprising;
a sensor device adapted for generating environmental parameter sensory data;
an antenna device for receiving said RF signals;
a means for converting received RF signals into voltage signals for input to a sensor device for activating said sensor device;
a means for converting sensory data obtained from said embedded sensor device to digital signals;
a means for storing said digital signals representing said sensory data; and
,an RF transmitter means adapted for wirelessly transmitting said sensory data;
a receiver means located externally from said wafer processing tool for receiving said transmitted sensory data; and
,a processing means for calculating operating condition correction factors and operating range setpoints based upon said received sensory data; and
,means for providing real-time adjusting of processing condition parameters in response to said correction factors and new operating range setpoints. - View Dependent Claims (23, 24, 25, 26)
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Specification