Method of manufacturing an implantable wireless sensor
First Claim
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1. A method of manufacturing a sensor, comprising the steps of:
- forming a first cavity in a first side of a first substrate, the first cavity having a base;
forming a first conductive structure on the base of the first cavity;
forming a second conductive structure on a surface of a second substrate;
mutually imposing the first and second substrates such that the first and second conductive structures are disposed in opposed, spaced-apart relation; and
using heat to bond the first and second substrates together and simultaneously to individualize the sensor, the heat being controlled such that said first and second conductive structures are not damaged thereby.
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Abstract
In the disclosed method of manufacturing an implantable wireless sensor, a cavity is etched in one side of a first substrate. A conductive structureare formed on the base of the cavity. A second conductive structureare formed on a surface of a second substrate, and the two substrates are mutually imposed such that the two conductive plates and coils are disposed in opposed, spaced-apart relation. A laser is then used to cut away perimeter portions of the imposed substrates and simultaneously to heat bond the two substrates together such that the cavity in the first substrate is hermetically sealed.
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25 Claims
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1. A method of manufacturing a sensor, comprising the steps of:
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forming a first cavity in a first side of a first substrate, the first cavity having a base;
forming a first conductive structure on the base of the first cavity;
forming a second conductive structure on a surface of a second substrate;
mutually imposing the first and second substrates such that the first and second conductive structures are disposed in opposed, spaced-apart relation; and
using heat to bond the first and second substrates together and simultaneously to individualize the sensor, the heat being controlled such that said first and second conductive structures are not damaged thereby. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification