Method of scavenging intermediate formed by reaction of oxidoreductase with substrate

• US 20060235558A1
• Filed: 03/29/2005
• Published: 10/19/2006
• Est. Priority Date: 08/28/2002
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Tanaka, Osamu
• Application Number:
  US10/541,379
• Publication Number:
  US 20060235558A1
• Time in Patent Office: Days
• US Class Current: 700/108
• CPC Class Codes: C12Q 1/26 involving oxidoreductase

Abstract

A process system 1 comprises a process apparatus 10 which performs a predetermined process on a wafer W, a plurality of detection means which detect statuses in the process apparatus 10, an abnormality detection section 15 which detects an abnormality in detection information from the plurality of detection means, an alarm generation section 16 which generates an alarm when the abnormality detection section 15 detects an abnormality, an information storage section 17 which stores the detection information from the detection means in the process apparatus 10 and alarm information as a process history of the process apparatus 10, an alarm-related information acquisition section 18 which selectively acquires information relating to an alarm selected from the information storage section 17, and a display section 21 which displays alarm-related information acquired by the alarm-related information acquisition section 18.

Claims

1. A process system comprising:

a process apparatus which performs a predetermined process on an object to be processed;

a plurality of detection means which detect statuses in the process apparatus;

an abnormality detection section which detects an abnormality in detection information from the plurality of detection means;

an alarm generation section which generates an alarm when the abnormality detection section detects an abnormality;

an information storage section which stores the detection information from the detection means and alarm information as a process history of the process apparatus;

an alarm-related information acquisition section which acquires information relating to an alarm selected from generated alarms from the information storage section; and

a display section which displays alarm-related information acquired by the alarm-related information acquisition section.

2. The process system according to claim 1, wherein the alarm-related information includes I/O address information relating to the alarm.

3. The process system according to claim 1, wherein the information storage section prestores brief information on alarms according to types of the alarms, and the alarm-related information acquisition section selects brief information on a selected alarm, and selects sequential information leading to generation of the alarm from information stored as the process history in the information storage section in association with the brief information.

4. The process system according to claim 3, wherein the alarm-related information acquisition section selects I/O information around generation of an alarm corresponding to the sequential information leading to generation of the alarm from information stored as the process history in the information storage section.

5. The process system according to claim 4, wherein the display section can display a first screen which displays the brief information on the selected alarm, a second screen which displays sequential information leading to generation of an alarm, and a third screen which displays I/O information around generation of an alarm.

6. The process system according to claim 3, wherein the brief information stored in the information storage section according to the each alarm includes an ID of the alarm, contents of the alarm, one or two or more possible reasons for generation, and actions against individual reasons for generation.

7. A process system comprising:

a process apparatus which performs a predetermined process on an object to be processed;

a plurality of detection means which detect statuses in the process apparatus;

an abnormality detection section which detects an abnormality in detection information from the plurality of detection means;

an alarm generation section which generates an alarm when the abnormality detection section detects an abnormality;

an information storage section which stores the detection information from the detection means and alarm information as a process history of the process apparatus and prestores an alarm table describing brief information according to individual alarms and linkable to the process history;

an alarm-related information acquisition section which selects brief information on an alarm selected from the alarm table in the information storage section and acquires, as link information, sequential information leading to generation of the selected alarm from information stored as the process history in the information storage section; and

a display section which displays alarm-related information acquired by the alarm-related information acquisition section.

8. The process system according to claim 7, wherein the alarm-related information acquisition section selects I/O information around generation of an alarm corresponding to the sequential information leading to generation of the alarm.

9. The process system according to claim 8, wherein the display section can display a first screen which displays the brief information on the selected alarm, a second screen which displays sequential information leading to generation of an alarm, and a third screen which displays I/O information around generation of an alarm.

10. The process system according to claim 7, wherein the brief information stored in the information storage section according to the each alarm includes an ID of the alarm, contents of the alarm, one or two or more possible reasons for generation, and actions against individual reasons for generation.

11. A process system comprising:

a plurality of process apparatuses which perform a predetermined process on an object to be processed;

an apparatus control unit which controls the plurality of process apparatuses based on information to be detected in the process apparatuses, detects an abnormality when the information to be detected in the process apparatuses is off a predetermined range, and generates an alarm when the abnormality detection section detects an abnormality; and

a control apparatus which receives all or nearly all process information from the process apparatuses, and controls the process apparatuses based on the process information, and which includes

an information storage section which stores the process information and alarm information received from the process apparatuses as process histories of the process apparatuses,

an alarm-related information acquisition section which acquires information relating to an alarm selected from generated alarms from the information storage section, and

a display section which displays alarm-related information acquired by the alarm-related information acquisition section.

12. A process system comprising:

a plurality of process apparatuses which perform a predetermined process on an object to be processed;

an apparatus control unit which controls the plurality of process apparatuses based on information to be detected in the process apparatuses, detects an abnormality when the information to be detected in the process apparatuses is off a predetermined range, and generates an alarm when the abnormality detection section detects an abnormality; and

a control apparatus which receives all or nearly all process information from the process apparatuses, and controls the process apparatuses based on the process information, and which includes

an information storage section which stores the process information and alarm information received from the process apparatuses as process histories of the process apparatuses, and prestores an alarm table describing brief information according to individual alarms and linkable to the process history,

an alarm-related information acquisition section which selects brief information on an alarm selected from the alarm table in the information storage section and acquires, as link information, sequential information leading to generation of the selected alarm from information stored as the process histories in the information storage section, and

a display section which displays alarm-related information acquired by the alarm-related information acquisition section.

13. A process method comprising:

storing detection information from a plurality of detection means provided in a process apparatus, which performs a predetermined process on an object to be processed, and information on alarms to be generated when detecting an abnormality in the detection information from the plurality of detection means, as a process history in an information storage section;

acquiring information relating to an alarm selected from the generated alarms from the information storage section; and

displaying alarm-related information acquired.

14. The process method according to claim 13, wherein the alarm-related information includes I/O address information relating to the alarm.

15. The process method according to claim 13, wherein the information storage section prestores brief information on alarms according to types of the alarms, selects brief information on a selected alarm, and selects sequential information leading to generation of the alarm from information stored as the process history in the information storage section in association with the brief information.

16. The process method according to claim 15, wherein acquisition of the alarm-related information is carried out by selecting I/O information around generation of an alarm corresponding to the sequential information leading to generation of the alarm from information stored as the process history in the information storage section.

17. The process method according to claim 16, wherein the alarm-related information is displayed on one of a first screen which displays the brief information on the selected alarm, a second screen which displays sequential information leading to generation of an alarm, and a third screen which displays I/O information around generation of an alarm.

21. The process method according to claim 15, wherein the brief information stored in the information storage section according to the each alarm includes an ID of the alarm, contents of the alarm, one or two or more possible reasons for generation, and actions against individual reasons for generation.

18. A process method comprising:

storing detection information from a plurality of detection means provided in a process apparatus, which performs a predetermined process on an object to be processed, and information on alarms to be generated when detecting an abnormality in the detection information from the plurality of detection means, as a process history in an information storage section;

prestoring an alarm table describing brief information according to individual alarms and linkable to the process history;

selecting brief information on an alarm selected from the alarm table in the information storage section;

acquiring, as link information, sequential information leading to generation of the selected alarm from information stored as the process history in the information storage section; and

displaying information selected from the alarm table and the acquired sequential information leading to generation of the selected alarm.

19. The process method according to claim 18, wherein acquisition of the alarm-related information is carried out by acquiring I/O information around generation of an alarm corresponding to the sequential information leading to generation of the alarm from information stored as the process history in the information storage section.

20. The process method according to claim 19, wherein the display is done on one of a first screen which displays the brief information on the selected alarm, a second screen which displays sequential information leading to generation of an alarm, and a third screen which displays I/O information around generation of an alarm.

22. A computer readable storage medium containing software that allows a computer to perform control in a way which comprises storing detection information from a plurality of detection means provided in a process apparatus, which performs a predetermined process on an object to be processed, and information on alarms to be generated when detecting an abnormality in the detection information from the plurality of detection means, as a process history in an information storage section, acquiring information relating to an alarm selected from the generated alarms from the information storage section, and displaying alarm-related information acquired.

23. A computer readable storage medium containing software that allows a computer to perform control in a way which comprises storing detection information from a plurality of detection means provided in a process apparatus, which performs a predetermined process on an object to be processed, and information on alarms to be generated when detecting an abnormality in the detection information from the plurality of detection means, as a process history in an information storage section, prestoring an alarm table describing brief information according to individual alarms and linkable to the process history, selecting brief information on an alarm selected from the alarm table in the information storage section, acquiring, as link information, sequential information leading to generation of the selected alarm from information stored as the process history in the information storage section, and displaying information selected from the alarm table and the acquired sequential information leading to generation of the selected alarm.

24. A computer program containing software that allows a computer to perform control in a way which comprises storing detection information from a plurality of detection means provided in a process apparatus, which performs a predetermined process on an object to be processed, and information on alarms to be generated when detecting an abnormality in the detection information from the plurality of detection means, as a process history in an information storage section, acquiring information relating to an alarm selected from the generated alarms from the information storage section, and displaying alarm-related information acquired.

25. A computer program containing software that allows a computer to perform control in a way which comprises storing detection information from a plurality of detection means provided in a process apparatus, which performs a predetermined process on an object to be processed, and information on alarms to be generated when detecting an abnormality in the detection information from the plurality of detection means, as a process history in an information storage section, prestoring an alarm table describing brief information according to individual alarms and linkable to the process history, select brief information on an alarm selected from the alarm table in the information storage section, acquiring, as link information, sequential information leading to generation of the selected alarm from information stored as the process history in the information storage section, and displaying information selected from the alarm table and the acquired sequential information leading to generation of the selected alarm.