Method for drying material to be heated, heating furnace, and method for manufacturing device
First Claim
1. A heating furnace comprising a housing chamber adapted to house a heating object, a heater for heating the heating object housed in the housing chamber, a vacuum pump for reducing a pressure inside the housing chamber, a pressure detector for detecting the pressure inside the housing chamber;
- a leakage detector for detecting any leak current that is caused by reducing the pressure inside the housing chamber while power is supplied to the heater; and
a controller for switching the power to the heater on or off on the basis of detection results from the pressure detector and the leakage detector.
1 Assignment
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Accused Products
Abstract
A heating furnace includes a housing chamber adapted to house a heating object, a heater for heating the heating object housed in the housing chamber, a vacuum pump for reducing a pressure inside the housing chamber, a pressure detector for detecting the pressure inside the housing chamber; a leakage detector for detecting any leak current that is caused by reducing the pressure inside the housing chamber while power is supplied to the heater; and a controller for switching the power to the heater on or off on the basis of detection results from the pressure detector and the leakage detector.
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Citations
10 Claims
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1. A heating furnace comprising
a housing chamber adapted to house a heating object, a heater for heating the heating object housed in the housing chamber, a vacuum pump for reducing a pressure inside the housing chamber, a pressure detector for detecting the pressure inside the housing chamber; -
a leakage detector for detecting any leak current that is caused by reducing the pressure inside the housing chamber while power is supplied to the heater; and
a controller for switching the power to the heater on or off on the basis of detection results from the pressure detector and the leakage detector. - View Dependent Claims (2, 3, 4)
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5. A method for drying a substrates to a specific region of which a functional liquid has been applied, the method comprising:
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reducing a pressure inside a housing chamber;
heating a heating object in the housing chamber with a heater;
switching off power to the heater once a leak current detection value, which is generated as the pressure inside the housing chamber is reduced while the power is supplied to the heater, reaches a set current value; and
switching on the power to the heater once the pressure in the housing chamber is further reduced after the heater has been switched off, and the detected value of the pressure inside the housing chamber reaches a set pressure value. - View Dependent Claims (7, 9, 10)
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6. A method for drying a substrate, to a specific region of which a functional liquid has been applied, the method comprising:
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reducing a pressure inside a housing chamber;
heating a heating object in the housing chamber with a heater;
switching off power to the heater once the pressure in the housing chamber is reduced to a first set value while the power is supplied to the heater; and
switching on the power to the heater once the pressure in the housing chamber is further reduced after the heater has been switched off, and the detected value of the pressure inside the housing chamber reaches a second set value. - View Dependent Claims (8)
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Specification