SENSOR DEVICE FOR NON-INTRUSIVE DIAGNOSIS OF A SEMICONDUCTOR PROCESSING SYSTEM
First Claim
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1. An apparatus for obtaining information from within a processing system, the apparatus comprising:
- a battery powered sensing device sized for transfer between a central transfer chamber and a vacuum processing chamber of the processing system by a substrate transfer robot, wherein the device is configured for obtaining information of a condition within the processing system.
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Abstract
A battery powered sensing device for diagnosing a processing system and method for using the same are provided. The support platform generally has physical characteristics, such as size, profile height, mass, flexibility and/or strength, substantially similar to those of the substrates that are to be processed in the processing system, so the sensor device can be transferred through the processing system in a manner similar to the manner in which production substrates are transferred through the processing system.
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Citations
20 Claims
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1. An apparatus for obtaining information from within a processing system, the apparatus comprising:
a battery powered sensing device sized for transfer between a central transfer chamber and a vacuum processing chamber of the processing system by a substrate transfer robot, wherein the device is configured for obtaining information of a condition within the processing system. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An apparatus for obtaining information from within a processing system, the apparatus comprising:
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a support platform adapted for transfer between a substrate transfer robot and a substrate support structure in a vacuum processing chamber of the processing system;
a sensing device coupled to the support platform; and
a battery coupled to the support platform and to the sensing device. - View Dependent Claims (11, 12, 13)
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14. A method of obtaining information from within a processing system, the method comprising:
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robotically moving a battery powered sensing device through a slit valve disposed between a central transfer chamber and a vacuum processing chamber of a processing system; and
obtaining, via the sensing device, information of a condition within the processing system. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification