Substrate processing apparatus and substrate processing method
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Abstract
The present invention relates to a substrate processing apparatus useful for plating a substrate or processing a substrate by dipping a substrate in a processing liquid. A substrate processing apparatus of the present invention includes: a loading/unloading area for carrying in and out a substrate; a cleaning area for cleaning the substrate; and a plating area for plating the substrate. The loading/unloading area is provided with a substrate transfer robot having a plurality of hands of dry-use design, a loading port mounted with a cassette for housing substrates, and a reversing machine of dry-use design for reversing the substrate from face up to face down.
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Citations
71 Claims
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1-65. -65. (canceled)
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66. A substrate holding device for holding a substrate by attracting the back surface of the substrate to the lower surface of an attracting head, comprising:
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a ring-shaped substrate attracting portion for attracting by vacuum the back surface of the substrate and functioning as a seal for preventing intrusion of a processing liquid into the inside of the ring-shaped vacuum-attracted portion of the back surface of the substrate; and
a pusher for pressing on the substrate attracted to the substrate attracting portion in a direction away from the attracting head, said substrate attracting portion and said pusher being mounted in a peripheral region of the lower surface of the attracting head. - View Dependent Claims (67, 68, 69)
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70. A substrate processing apparatus, comprising:
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a substrate holding device for holding a substrate by attracting the back surface of the substrate to the lower surface of an attracting head;
said substrate holding device including a ring-shaped substrate attracting portion for attracting by vacuum the back surface of the substrate and functioning as a seal for preventing intrusion of a processing liquid into the inside of the ring-shaped vacuum-attracted portion of the back surface of the substrate, and a pusher for pressing on the substrate attracted to the substrate attracting portion in a direction away from the attracting head, said substrate attracting portion and said pusher being mounted in a peripheral region of the lower surface of the attracting head; and
a substrate processing section for carrying out processing of a processing surface of the substrate held in the substrate holding device with the processing liquid.
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71. (canceled)
Specification