A NON-CONTACTING ELECTROSTATICALLY-DRIVEN MEMS DEVICE
First Claim
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1. A microelectromechanical device, comprising:
- a substrate;
a first electrode formed on the substrate, the first electrode having at least one extension extending from a first portion of the first electrode and at least one extension extending from a second portion of the first electrode, the second portion being substantially opposed to the first portion;
a second electrode formed on the substrate substantially adjacent to the first portion of the first electrode, the second electrode having at least one extension extending towards the first electrode; and
a third electrode formed on the substrate substantially adjacent to the second portion of the first electrode, the third electrode having at least one extension extending towards the first electrode;
wherein the at least one extension of the first portion of the first electrode substantially overlaps the at least one extension of the second electrode and the at least one extension of the second portion of the first electrode substantially overlaps the at least one extension of the third electrode.
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Abstract
An improved microelectromechanical systems (MEMS) device, which eliminates, or at least reduces, “stiction” is described. The MEMS device includes a central electrode and a pair of outer electrodes formed on a substrate. The central electrode includes a plurality of extensions defining a plurality of grooves interspersed with the extensions. The outer electrodes include a plurality of extensions disposed within the grooves of the central electrode.
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Citations
20 Claims
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1. A microelectromechanical device, comprising:
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a substrate;
a first electrode formed on the substrate, the first electrode having at least one extension extending from a first portion of the first electrode and at least one extension extending from a second portion of the first electrode, the second portion being substantially opposed to the first portion;
a second electrode formed on the substrate substantially adjacent to the first portion of the first electrode, the second electrode having at least one extension extending towards the first electrode; and
a third electrode formed on the substrate substantially adjacent to the second portion of the first electrode, the third electrode having at least one extension extending towards the first electrode;
wherein the at least one extension of the first portion of the first electrode substantially overlaps the at least one extension of the second electrode and the at least one extension of the second portion of the first electrode substantially overlaps the at least one extension of the third electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A microelectromechanical device, comprising:
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a substrate;
a first electrode formed on the substrate, the first electrode having a plurality of spaced apart extensions extending from opposing sides of the first electrode, the spaced apart extensions defining a plurality of grooves interspersed with the extensions;
a pair of additional electrodes formed on the substrate adjacent to the opposing sides of the first electrode, the additional electrodes having a plurality of spaced apart extensions disposed within the grooves defined at opposing sides of the first electrode;
wherein the at least one extension of the first portion of the first electrode substantially overlaps the at least one extension of the second electrode and the at least one extension of the second portion of the first electrode substantially overlaps the at least one extension of the third electrode. - View Dependent Claims (18, 19)
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20. A method for reducing stiction associated with operation of microelectromechanical devices, comprising:
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forming a microelectromechanical device to include a first electrode and a pair of electrodes flanking the first electrode, the first electrode interfacing with the pair of electrodes via a plurality extensions disposed within a plurality of grooves defined in the pair of electrodes, wherein the at least one extension of the first portion of the first electrode substantially overlaps the at least one extension of the second electrode and the at least one extension of the second portion of the first electrode substantially overlaps the at least one extension of the third electrode;
whereby the surface area defined at the interface between the first electrode and the pair of electrodes generates an electrostatic force large enough to overcome surface adhesion forces associated with operation of the microelectromechanical device.
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Specification