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MEMS Fabrication on a Laminated substrate

  • US 20060238951A1
  • Filed: 07/03/2006
  • Published: 10/26/2006
  • Est. Priority Date: 12/31/2002
  • Status: Active Grant
First Claim
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1. An electrical apparatus, comprising:

  • a printed circuit board (PCB) substrate having a maximum operating temperature less than 250 degrees Celsius; and

    a micro-electro-mechanical (MEM) device formed on the PCB substrate.

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