Shell type actuator
First Claim
Patent Images
1. A micromechanical resonator comprising:
- a substrate;
a partial spherical shell clamped on an outside portion of the shell to the substrate.
3 Assignments
0 Petitions
Accused Products
Abstract
A micromechanical resonator is formed on a substrate. The resonator has a partial spherical shell clamped on an outside portion of the shell to the substrate. In other embodiments, a flat disc or other shape may be used. Movement is induced in a selected portion of the disc, inducing easily detectible out-of-plane motion. A laser is used in one embodiment to heat the selected portion of the disc and induce the motion. The motion may be detected by capacitive or interferometric techniques.
-
Citations
30 Claims
-
1. A micromechanical resonator comprising:
-
a substrate;
a partial spherical shell clamped on an outside portion of the shell to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A method of forming a spherical shaped micromechanical resonator, the method comprising:
-
forming a sacrificial layer on a substrate;
forming a polysilicon film on top of the sacrificial layer;
forming a hole through the polysilicon film;
removing a portion of the sacrificial layer to form a suspended and buckled membrane-like micromechanical structure with a hole at the center. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
-
-
17. A micromechanical resonator comprising:
-
a substrate;
a partial spherical shell clamped on an outside portion of the shell to the substrate; and
means for inducing movement of the shell. - View Dependent Claims (18, 19, 20)
-
-
21. A micromechanical resonator comprising:
-
a substrate;
a disc clamped on an outside portion of the disc to the substrate;
means for inducing movement of the disc; and
means for detecting movement of the disc. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
-
Specification