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REAL-TIME MANAGEMENT SYSTEMS AND METHODS FOR MANUFACTURING MANAGEMENT AND YIELD RATE ANALYSIS INTEGRATION

  • US 20060241802A1
  • Filed: 09/19/2005
  • Published: 10/26/2006
  • Est. Priority Date: 04/26/2005
  • Status: Active Grant
First Claim
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1. A real-time management method for manufacturing management and yield rate analysis integration, comprising:

  • collecting a plurality of yield rates and inline QC parameters relating to wafer products in a predetermined period;

    summing and averaging the yield rates for a historical yield rate;

    selecting multiple representational inline QC parameters;

    implementing a statistical process, comprising;

    determining whether at least one extreme value exists in the representational inline QC parameters;

    if no extreme value exists, determining whether at least one collinear parameter exists in the representational inline QC parameters; and

    if no collinear parameter exists, determining whether residual analyses relating to the statistical process satisfy normal distribution;

    if the analysis result satisfies normal distribution, selecting multiple optimum inline QC parameters from the representational inline QC parameters;

    calculating weights of each optimum inline QC parameter; and

    calculating a predicted yield rate according to the historical yield rate, weights, and a plurality of measurement and target values relating to the wafer products.

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