System and method for Micro Electro Mechanical System (MEMS) device characterization

• US 20060243023A1
• Filed: 03/30/2006
• Published: 11/02/2006
• Est. Priority Date: 03/30/2005
• Status: Active Grant

• Current Assignee: National University of Singapore
• Original Assignee: National University of Singapore
• Inventors: Wong, Wai Kin
• Granted Patent: US 7,538,474 B2
• Time in Patent Office: Days
• US Class Current: 73/1.150
• CPC Class Codes: B81C 99/004 during manufacturing
• CPC Class Codes: B81C 99/0045 End test of the packaged device
• CPC Class Codes: B81C 99/005 Test apparatus
• CPC Class Codes: G01B 17/00 Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
• CPC Class Codes: G01H 11/08 using piezoelectric devices
• CPC Class Codes: G01H 13/00 Measuring resonant frequency
• CPC Class Codes: G01H 15/00 Measuring mechanical or acoustic impedance
• CPC Class Codes: H01H 1/0036 Switches making use of microelectromechanical systems [MEMS] for electromagnetic relays H01H50/005; for electrostatic relays H01H59/0009

Abstract

A system and method for Micro Electro Mechanical System (MEMS) device characterization. The system comprising a stimulator for stimulating the device to generate phonons in the device; a detector for detecting the generated phonons; a converter for converting the phonons into a signal representative of displacement of a MEMS component of the device.

Claims

1. A system for Micro Electro Mechanical System (MEMS) device characterization;

the system comprising;

a stimulator for stimulating the device to generate phonons in the device;

a detector for detecting the generated phonons;

a converter for converting the phonons into a signal representative of displacement of a MEMS component of the device.

2. The system as claimed in claim 1, wherein the signal comprises an electrical signal.

3. The system as claimed in claim 2, wherein the detector and the converter are implemented as a piezoelectric transducer for detecting and converting the phonons into the electrical signal.

4. The system as claimed in claim 3, further comprising an acoustic coupler disposed between the device and the piezoelectric transducer.

5. The system as claimed in claim 2, further comprising an amplifier for amplifying the electrical signal.

6. The system as claimed in claim 1, wherein the stimulator comprises a driving signal source for activating the MEMS component.

7. The system as claimed in claim 1, wherein the stimulator applies an external force to the MEMS device for activating the MEMS component.

16. The system as claimed in claim 3, further comprising an amplifier for amplifying the electrical signal.

8. A method for Micro Electro Mechanical System (MEMS) device characterization;

the method comprising the steps of;

stimulating the device to generate phonons in the device;

detecting the generated phonons;

converting the phonons into a signal representative of displacement of a MEMS component of the device.

9. The method as claimed in claim 8, wherein the signal comprises an electrical signal.

10. The method as claimed in claim 9, wherein the phonons are detected and converted into the electrical signal utilising a piezoelectric transducer.

11. The method as claimed in claim 10, further comprising utilising an acoustic coupler disposed between the device and the piezoelectric transducer.

12. The method as claimed in claim 11, further comprising utilising pliable materials with the acoustic coupler for non-planar samples.

13. The method as claimed in claim 9, further comprising amplifying the electrical signal.

14. The method as claimed in claim 8, wherein the stimulating comprises activating the MEMS component utilising a driving signal for the MEMS device.

15. The method as claimed in claim 8, wherein the stimulating comprises activating the MEMS component by applying an external force to the MEMS device.

17. The method as claimed in claim 10, further comprising amplifying the electrical signal.