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System and method for Micro Electro Mechanical System (MEMS) device characterization

  • US 20060243023A1
  • Filed: 03/30/2006
  • Published: 11/02/2006
  • Est. Priority Date: 03/30/2005
  • Status: Active Grant
First Claim
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1. A system for Micro Electro Mechanical System (MEMS) device characterization;

  • the system comprising;

    a stimulator for stimulating the device to generate phonons in the device;

    a detector for detecting the generated phonons;

    a converter for converting the phonons into a signal representative of displacement of a MEMS component of the device.

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