Pressure measuring cell
First Claim
1. A pressure measuring cell, having a base body (1, 23, 25);
- a membrane (5, 27), connected to the base body (1, 23, 25), forming a measuring chamber (3, 29, 31), which in operation executes a deflection that is dependent on a pressure to be measured (p, p1-p2);
a membrane bed, formed by a surface, oriented toward the membrane, of the base body (1, 23, 25), onto which bed at least one electrode (7, 33, 67) is applied, which together with a counter-electrode (9, 35, 69) applied to the membrane (5, 27) forms a capacitor, whose capacitance is a measure for the deflection of the membrane (5, 27); and
a contact pin (13, 59, 71), passed through a bore (11, 57, 71) through the base body (1, 23, 25), by way of which pin the electrode (7, 33, 67) is electrically connected for measuring the capacitance, and which toward the membrane bed is soldered into the bore (11, 57, 71) with a solder (19, 57, 75), and the contact pin (13, 59, 73), the solder (19, 57, 75), and the membrane bed form a smooth surface.
1 Assignment
0 Petitions
Accused Products
Abstract
The invention relates to a pressure measuring cell comprising a base body, a membrane that is connected to the base body, thus forming a measuring chamber. During operation, the membrane is subjected to a deflection which is dependent on a pressure that is to be measured. The cell also comprises a membrane bed, formed by a surface of the base body that faces the membrane, at least one electrode being mounted on said bed. Said electrode, together with a counter-electrode that is mounted on the membrane, forms a capacitor, whose capacitance represents a measurement for the deflection of the membrane. The measuring cell is characterized in that the electrode is electrically connected through the base body and that the measuring chamber has a smooth surface in the contact zone, said surface having a contact pin that is guided in a bore through the base body. The electrode is electrically connected by means of said pin for measuring the capacitance and the pin is soldered into the bore on the membrane side, using a solder. The contact pin, the solder and the membrane bed form a smooth surface.
14 Citations
8 Claims
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1. A pressure measuring cell, having
a base body (1, 23, 25); -
a membrane (5, 27), connected to the base body (1, 23, 25), forming a measuring chamber (3, 29, 31), which in operation executes a deflection that is dependent on a pressure to be measured (p, p1-p2);
a membrane bed, formed by a surface, oriented toward the membrane, of the base body (1, 23, 25), onto which bed at least one electrode (7, 33, 67) is applied, which together with a counter-electrode (9, 35, 69) applied to the membrane (5, 27) forms a capacitor, whose capacitance is a measure for the deflection of the membrane (5, 27); and
a contact pin (13, 59, 71), passed through a bore (11, 57, 71) through the base body (1, 23, 25), by way of which pin the electrode (7, 33, 67) is electrically connected for measuring the capacitance, and which toward the membrane bed is soldered into the bore (11, 57, 71) with a solder (19, 57, 75), and the contact pin (13, 59, 73), the solder (19, 57, 75), and the membrane bed form a smooth surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification