Piezoelectric motor drive circuit and method
First Claim
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1. An arrangement for electrically driving a piezoelectric transducer to mechanically oscillate a mirror at a mechanical resonant frequency, comprising:
- a) an inductor electrically connected to the transducer to form a resonant circuit having an electrical resonant frequency which is greater than the mechanical resonant frequency throughout variations in temperature, ageing and tolerances of the transducer and the inductor;
b) means for driving the resonant circuit with an electrical drive signal having a drive frequency which differs from the electrical resonant frequency by a parameter; and
c) means for adjusting the parameter to make the drive frequency correspond to the mechanical resonant frequency to compensate for said variations in the electrical resonant frequency.
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Abstract
A piezoelectric transducer is driven to mechanically oscillate a mirror at a mechanical resonant frequency with high precision despite frequency variations introduced by temperature, tolerances and ageing of components.
30 Citations
18 Claims
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1. An arrangement for electrically driving a piezoelectric transducer to mechanically oscillate a mirror at a mechanical resonant frequency, comprising:
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a) an inductor electrically connected to the transducer to form a resonant circuit having an electrical resonant frequency which is greater than the mechanical resonant frequency throughout variations in temperature, ageing and tolerances of the transducer and the inductor;
b) means for driving the resonant circuit with an electrical drive signal having a drive frequency which differs from the electrical resonant frequency by a parameter; and
c) means for adjusting the parameter to make the drive frequency correspond to the mechanical resonant frequency to compensate for said variations in the electrical resonant frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of electrically driving a piezoelectric transducer to mechanically oscillate a mirror at a mechanical resonant frequency, comprising the steps of:
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a) electrically connecting an inductor to the transducer to form a resonant circuit having an electrical resonant frequency which is greater than the mechanical resonant frequency throughout variations in temperature, ageing and tolerances of the transducer and the inductor;
b) driving the resonant circuit with an electrical drive signal having a drive frequency which differs from the electrical resonant frequency by a parameter; and
c) adjusting the parameter to make the drive frequency correspond to the mechanical resonant frequency to compensate for said variations in the electrical resonant frequency. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification