Micro-mirror element with double binge
First Claim
1. A micro-mirror element comprising:
- a lower layer including an address portion for receiving an address voltage and a bias portion for receiving a bias voltage respectively;
a first middle layer including a first rotating beam and a pair of bias beams, each bias beam electrically coupled to the bias portion of the lower layer by at least one via;
a second middle layer including a hinge electrically coupled to at least one of the bias beams of the first middle layer and also including a second rotating beam electrically coupled to the hinge, the second rotating beam also electrically coupled to the first rotating beam by at least one via;
a micro-mirror comprising a reflective surface operable to selectively tilt to reflect a beam of light, the micro-mirror electrically coupled to the second rotating beam by at least one via;
wherein application of the bias voltage to the bias portion and the address voltage to the address portion creates a first, second, and third electrostatic attractions that collectively result in a force operable to tilt the mirror, the first electrostatic attraction being between the address portion and the first rotating beam, the second electrostatic attraction being between the address portion and the second rotating beam, and the third electrostatic attraction being between the address portion and the micro-mirror;
wherein the first middle layer is disposed between the lower layer and the second middle layer; and
wherein the second middle layer is disposed between the first middle layer and the micro-mirror.
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Accused Products
Abstract
According to one embodiment of the present invention a micro-mirror element comprises a lower layer, a first middle layer, a second middle layer, and a micro-mirror. The lower layer includes an address portion for receiving an address voltage and a bias portion for receiving a bias voltage respectively. The first middle layer is electrically coupled to the bias portion of the lower layer. The second middle layer is electrically coupled to the first middle layer. The micro-mirror is coupled to the second middle layer and comprises a reflective surface operable to selectively tilt, in response to an application of a bias voltage and an address voltage to the lower layer, to reflect a beam of light.
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Citations
20 Claims
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1. A micro-mirror element comprising:
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a lower layer including an address portion for receiving an address voltage and a bias portion for receiving a bias voltage respectively;
a first middle layer including a first rotating beam and a pair of bias beams, each bias beam electrically coupled to the bias portion of the lower layer by at least one via;
a second middle layer including a hinge electrically coupled to at least one of the bias beams of the first middle layer and also including a second rotating beam electrically coupled to the hinge, the second rotating beam also electrically coupled to the first rotating beam by at least one via;
a micro-mirror comprising a reflective surface operable to selectively tilt to reflect a beam of light, the micro-mirror electrically coupled to the second rotating beam by at least one via;
wherein application of the bias voltage to the bias portion and the address voltage to the address portion creates a first, second, and third electrostatic attractions that collectively result in a force operable to tilt the mirror, the first electrostatic attraction being between the address portion and the first rotating beam, the second electrostatic attraction being between the address portion and the second rotating beam, and the third electrostatic attraction being between the address portion and the micro-mirror;
wherein the first middle layer is disposed between the lower layer and the second middle layer; and
wherein the second middle layer is disposed between the first middle layer and the micro-mirror. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A micro-mirror element comprising:
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a lower layer including an address portion for receiving an address voltage and a bias portion for receiving a bias voltage respectively;
a first middle layer electrically coupled to the bias portion of the lower layer;
a second middle layer electrically coupled to the first middle layer; and
a micro-mirror coupled to the second middle layer comprising a reflective surface operable to selectively tilt, in response to an application of a bias voltage and an address voltage to the lower layer, to reflect a beam of light. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A method of tilting a digital micro-mirror pixel element, the method comprising:
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providing a micro-mirror element with a lower layer that includes an address portion, a first middle layer that includes a rotating beam, a second middle layer that includes a second rotating beam, and a micro-mirror;
applying an address voltage to the address portion;
applying a bias voltage to the first rotating beam and the second rotating beam; and
creating a first electrostatic attraction between the address portion and the first rotating beam and a second electrostatic attraction between the address portion and the second rotating beam by applying the address voltage to the address portion and the bias voltage to the first and second rotating beams respectively, wherein the first and second electrostatic attractions result in at least a portion of a force operable to tilt the micro-mirror. - View Dependent Claims (20)
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Specification