Substrate cassette
First Claim
Patent Images
1. A substrate cassette for supporting glass substrates, comprising:
- a top frame;
a bottom frame, positioned opposite to the top frame;
a plurality of side plates, movably connecting with both the top frame and the bottom frame such that the glass substrates are prevented from slipping out of the substrate cassette; and
a plurality of supporting units, wherein each supporting unit is configured to support a glass substrate and comprises;
a plurality of connection rods, movably connecting between two neighboring side plates;
a plurality of supporting rods, being movably connected between corresponding connection rods; and
substrate-supporting rods, being movably positioned on the supporting rods to support the glass substrates such that spaces are formed between the glass substrate and the supporting rods.
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Abstract
A substrate cassette includes a top frame, a bottom frame, a plurality of side plates and a plurality of supporting units. The side plates are used to connect the top frame and the bottom frame. Each supporting unit includes a plurality of connection rods, a plurality of supporting rods and substrate-supporting rods. Each connection rod is used to connect two neighboring side plates. The supporting rods are connected between corresponding connection rods, and the substrate-supporting rods are positioned on the supporting rods to support substrates.
17 Citations
18 Claims
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1. A substrate cassette for supporting glass substrates, comprising:
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a top frame;
a bottom frame, positioned opposite to the top frame;
a plurality of side plates, movably connecting with both the top frame and the bottom frame such that the glass substrates are prevented from slipping out of the substrate cassette; and
a plurality of supporting units, wherein each supporting unit is configured to support a glass substrate and comprises;
a plurality of connection rods, movably connecting between two neighboring side plates;
a plurality of supporting rods, being movably connected between corresponding connection rods; and
substrate-supporting rods, being movably positioned on the supporting rods to support the glass substrates such that spaces are formed between the glass substrate and the supporting rods. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A substrate cassette, comprising:
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a top frame;
a bottom frame, positioned opposite to the top frame;
a plurality of side plates, movably connecting with both the top frame and the bottom frame such that glass substrates are prevented from slipping out of the substrate cassette;
a plurality of supporting units, wherein each supporting unit is configured to support a glass substrate and comprises;
a plurality of connection rods, movably connecting between two neighboring side plates;
a plurality of supporting rods, being movably connected between corresponding connection rods; and
substrate-supporting rods, being movably positioned on the supporting rods to support the glass substrates such that spaces are formed between the glass substrate and the supporting rods, a plurality of backside plates being movably connected between the top frame and the bottom frame to prevent one of the glass substrates supported by one of the supporting units from sliding out of the one of the supporting units. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A substrate cassette, comprising:
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a top frame;
a bottom frame, positioned opposite to the top frame;
a plurality of side plates, movably connecting with both the top frame and the bottom frame such that glass substrates are prevented from slipping out of the substrate cassette;
a plurality of supporting units, wherein each supporting unit comprising;
a plurality of supporting plate, being movably connected with corresponding side plates; and
a plurality of substrate-supporting rods, being movably positioned on the supporting rods to support the glass substrates, and some of the substrate-supporting rods including guide ramps that are used to guide one of the glass substrates. - View Dependent Claims (16, 17, 18)
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Specification