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Force sensor array having magnetostrictive magnetoresistive sensors and method for determining a force

  • US 20060246271A1
  • Filed: 03/07/2006
  • Published: 11/02/2006
  • Est. Priority Date: 03/07/2005
  • Status: Active Grant
First Claim
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1. A force sensor having a layer sequence for determining a force acting on the layer sequence along a predefined force axis, the layer sequence comprising:

  • a first magnetic layer with a first magnetization direction;

    a separating layer; and

    a second magnetic layer with a second magnetization direction, the first magnetic layer, separating layer, and second magnetic layer arranged successively in a vertical direction;

    wherein the first magnetization direction is fixed with respect to the layer sequence;

    wherein the second magnetic layer has a magnetostriction constant that is different from zero;

    wherein the second magnetic layer has a uniaxial magnetic anisotropy with an anisotropy axis;

    wherein the uniaxial magnetic anisotropy is generated using shape anisotropy;

    wherein the second magnetization direction encloses an angle of more than 0° and

    less than 90°

    with the force axis in the quiescent state; and

    wherein the anisotropy axis encloses an angle of more than 0° and

    less than 90°

    with the force axis.

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