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Materials for chemical mechanical polishing

  • US 20060246831A1
  • Filed: 05/02/2005
  • Published: 11/02/2006
  • Est. Priority Date: 05/02/2005
  • Status: Active Grant
First Claim
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1. A processing article for removing material from a substrate, comprising:

  • a linear base film;

    an adhesive layer; and

    a plurality of polishing tiles positioned on the adhesive layer across a width of the base film and configured to define a plurality of grooves therebetween, wherein the plurality of grooves enable fluid flow therein and facilitate delivery and take up in a roll format.

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