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C AND N-DOPED TITANIUMOXIDE-BASED PHOTOCATALYTIC AND SELF-CLEANING THIN FILMS AND THE PROCESS FOR PRODUCTION THEREOF

  • US 20060247125A1
  • Filed: 04/26/2006
  • Published: 11/02/2006
  • Est. Priority Date: 04/27/2005
  • Status: Active Grant
First Claim
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1. A method to prepare titanium oxide-based photocatalysts and self-cleaning materials having a general formula of TiO2-X-δ

  • CXNδ

    , wherein 0<

    X+δ

    <

    0.22, 0<

    X<

    0.2, and 0<

    δ

    <

    0.02, comprising;

    (1) formation process of forming a thin film on a substrate using an inert gas, a mixed gas consisted of N2 and CO, and a metal Ti by a reactive sputtering; and

    (2) heat treatment process wherein the formed thin film is heat treated at a temperature between 450°

    C. and 500°

    C. for 2 to 4 hours.

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