Supporting unit, and moving table device and linear-motion guiding device using the supporting unit
2 Assignments
0 Petitions
Accused Products
Abstract
A supporting unit in a moving table device, easily connected to a base and a table, is provided. A supporting unit (Uα) has a pair of planar bearing plates. Inside the planar bearing plates are positioned spherical bearing plates, respectively. Further, a spherical axial member is sandwiched between the spherical bearing plates (34a, 34b). A planar bearing is formed between each of the planar bearing plates and each of the spherical bearing plates. A spherical bearing is formed between each of the spherical bearing plates and the spherical axial member. Thus, the supporting unit (Uα) is provided with a certain degree of movability in five-axis directions. With the high degree of movability, the supporting unit (Uα) can be easily connected to a base and a table.
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Citations
29 Claims
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1-15. -15. (canceled)
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16. A supporting unit comprising:
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an axial member, a pair of first bearing members positioned to sandwich the axial member, and a pair of second bearing members positioned to externally sandwich the first bearing members, wherein the first bearing members are provided with first bearings that support the axial member, and either the first bearing members or the second bearing members are provided with second bearings that support the first bearing members, and wherein either both of the first bearings, or both of the second bearings are configured as spherical bearings, and the other two bearings are configured as planar bearings. - View Dependent Claims (17, 18, 19, 20, 24, 26, 27, 28)
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21. A supporting unit comprising:
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an installation shaft, a first bearing member positioned to surround the installation shaft, a pair of second bearing members positioned to sandwich the first bearing member, and a pair of third bearing members positioned to externally sandwich the second bearing members, wherein the first bearing member is provided with a first bearing that supports the installation shaft, the second bearing members are provided with second bearings that support the first bearing member, and either the second bearing members or the third bearing members are provided with third bearings that support the second bearings, and wherein the first bearing is configured as a linear bearing that guides the movement in the axial direction of the installation shaft, either both of the second bearings or both of the third bearings are configured as spherical bearings, and the other two bearings are configured as linear bearings that guide the movement in the direction that is perpendicular to said axial direction. - View Dependent Claims (22, 23, 25, 29)
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Specification