Methods and apparatus for sealing an opening of a processing chamber

• US 20060249701A1
• Filed: 07/03/2006
• Published: 11/09/2006
• Est. Priority Date: 05/13/2003
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kurita, Shinichi, Blonigan, Wendell T., Lee, Ke Ling
• Application Number:
  US11/480,615
• Publication Number:
  US 20060249701A1
• Time in Patent Office: Days
• US Class Current: 251/195
• CPC Class Codes: F16K 3/188 by means of hydraulic forces
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations
• CPC Class Codes: H01L 21/67126 Apparatus for sealing, encapsulating, glassing, decapsulating or the like processes H01L23/02, H01L23/28

Abstract

In one embodiment, a slit valve is provided that is adapted to seal an opening and that includes a valve housing having a first wall, a first opening formed in the first wall, a second wall and a second opening formed in the second wall. The slit valve also includes a closure member having a sealing portion adapted to contact the second wall and seal the second opening, and a bracing member moveable relative to the sealing portion and adapted to contact the first wall. The slit valve further includes at least one actuating mechanism adapted to (1) move the sealing portion toward the second wall and into contact with the second wall; and (2) move the bracing member away from the sealing portion and into contact with the first wall so as to brace the sealing portion against the second wall. Numerous other aspects are provided.

Claims

1. A slit valve adapted to seal an opening comprising:

a valve housing having;

a first wall;

a first opening formed in the first wall;

a second wall; and

a second opening formed in the second wall;

a closure member having;

a sealing portion adapted to contact the second wall and seal the second opening; and

a bracing member moveable relative to the sealing portion and adapted to contact the first wall; and

at least one actuating mechanism adapted to;

move the sealing portion toward the second wall and into contact with the second wall; and

move the bracing member away from the sealing portion and into contact with the first wall so as to brace the sealing portion against the second wall.

2. The slit valve of claim 1, wherein the at least one actuating mechanism includes an actuator that comprises a portion of the closure member and is disposed between the bracing member and the sealing portion.

3. The slit valve of claim 1, wherein the sealing portion includes a resilient element adapted to contact and seal against the second wall.

4. The slit valve of claim 1, wherein the bracing member includes a resilient element adapted to contact the first wall.

5. The slit valve of claim 1, wherein the bracing member is adapted to assume a retracted transverse position within the sealing portion.

6. The slit valve of claim 1, wherein the at least one actuating mechanism comprises a pneumatic actuator adapted to be selectably activated via positive pressure and vacuum pressure.

7. The slit valve of claim 6, wherein the pneumatic actuator is adapted to employ positive pressure to move the bracing member from a retracted transverse position against the sealing portion to a deployed transverse position against the first wall.

8. The slit valve of claim 6, wherein the pneumatic actuator is adapted to employ vacuum pressure to move the bracing member from a deployed transverse position against the first wall to a retracted transverse position against the sealing member.

9. The slit valve of claim 1, wherein the at least one actuating mechanism includes a pneumatic actuator comprising a pressure cell.

10. The slit valve of claim 9, wherein a portion of the bracing member defines a boundary of the pressure cell.

11. The slit valve of claim 9, wherein a portion of the sealing portion defines a boundary of the pressure cell.

12. The slit valve of claim 10, wherein the at least one actuating mechanism further comprises a bellows, and wherein the bellows also defines a boundary of the pressure cell.

13. The slit valve of claim 12, wherein the bracing member is coupled to the sealing portion via the bellows.

14. The slit valve of claim 13, wherein no coupling between the bracing member and the sealing portion exists except via the bellows.

15. The slit valve of claim 12, wherein the bellows is oriented such that an expansion of the pressure cell produces contraction of the bellows.

16. The slit valve of claim 12, wherein the bracing member comprises a plate, and wherein the plate also defines a boundary of the pressure cell.

17. The slit valve of claim 16, wherein the bracing member is adapted to assume a retracted transverse position away from the first wall such that the plate of the bracing member is within the sealing portion.

18. The slit valve of claim 16, wherein the bracing member is adapted to assume a deployed transverse position against the first wall such that the plate of the bracing member remains within the sealing portion.

19. The slit valve of claim 1, wherein the at least one actuating mechanism includes a first actuating mechanism that is external to the slit valve housing.

20. The slit valve of claim 19, wherein the first actuating mechanism comprises a pneumatic actuator adapted to be activated via positive pressure.