Utilities transfer system in a lithography system
First Claim
1. A stage system comprising:
- a transformer that includes an inductive core, an inductive primary coil, and an inductive secondary coil; and
a stage device that supports the secondary coil;
said primary coil and said secondary coil configured to surround at least a portion of the inductive core, and the inductive core and the secondary coil substantially maintain a separation distance from each other during relative movement between the stage and the inductive core;
wherein an electrical current of the primary coil creates an electromagnetic field that causes an electrical current, via the inductive core, to flow within the secondary coil.
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Accused Products
Abstract
Techniques for transferring utilities to and from a reticle or wafer stage in a lithography system while minimizing physical disturbances that affect the stage are described. These techniques involve transferring utilities to and from the stage without making physical contact with the stage. Alternatively, utilities are transferred by making physical contact with the stage while the stage is in a stationary position. In addition to transferring utilities to and from the stage, devices such as processing devices, buffers (storage mediums), electrical components, and mechanical components can be placed within the stage to use and/or control the transferred utilities.
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Citations
16 Claims
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1. A stage system comprising:
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a transformer that includes an inductive core, an inductive primary coil, and an inductive secondary coil; and
a stage device that supports the secondary coil;
said primary coil and said secondary coil configured to surround at least a portion of the inductive core, and the inductive core and the secondary coil substantially maintain a separation distance from each other during relative movement between the stage and the inductive core;
wherein an electrical current of the primary coil creates an electromagnetic field that causes an electrical current, via the inductive core, to flow within the secondary coil. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A lithography apparatus comprising:
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a lens assembly that projects and/or focuses the light or beam from an illumination system;
a transformer that includes an inductive core, an inductive primary coil, and an inductive secondary coil; and
a stage device that supports the secondary coil;
said primary coil and said secondary coil configured to surround at least a portion of the inductive core, and the inductive core and the secondary coil substantially maintain a separation distance from each other during relative movement between the stage and the inductive core;
wherein an electrical current of the primary coil creates an electromagnetic field that causes an electrical current, via the inductive core, to flow within the secondary coil. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification