Magnetic sensing element including laminated film composed of half-metal and NiFe alloy as free layer
First Claim
1. A magnetic sensing element comprising a multilayer film including a pinned magnetic layer, a free magnetic layer, and a non-magnetic material layer disposed therebetween, wherein the free magnetic layer comprises a Co2MnZ alloy layer (where Z represents at least one element selected from the group consisting of Al, Sn, In, Sb, Ga, Si, Ge, Pb, and Zn) and a (NiaFe100-a)bX100-b alloy layer (where X represents at least one element selected from the group consisting of Cu, Au, Ag, Zn, Mn, Al, Cd, Zr, and Hf, and a represents a composition ratio satisfying 80<
- a≦
100 in terms of atomic percent and b represents a composition ratio satisfying 60<
b≦
100 in terms of atomic percent).
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Accused Products
Abstract
A magnetic sensing element exhibiting a large ΔRA is provided, in which a free magnetic layer has a small coercive force Hc and a small magnetostriction constant λs. The free magnetic layer includes a Co2MnZ alloy layer (where Z may represent at least one element selected from the group consisting of Al, Sn, In, Sb, Ga, Si, Ge, Pb, and Zn) and a (NiaFe100-a)bX100-b alloy layer (where X may represent at least one element selected from the group consisting of Cu, Au, Ag, Zn, Mn, Al, Cd, Zr, and Hf, a may represent a composition ratio satisfying 80<a≦100, and b may represent a composition ratio satisfying 60<b≦100). Consequently, the magnetostriction constant λs and the coercive force Hc of the free magnetic layer may be decreased and the soft magnetic properties of the free magnetic layer may be improved.
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Citations
19 Claims
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1. A magnetic sensing element comprising a multilayer film including a pinned magnetic layer, a free magnetic layer, and a non-magnetic material layer disposed therebetween,
wherein the free magnetic layer comprises a Co2MnZ alloy layer (where Z represents at least one element selected from the group consisting of Al, Sn, In, Sb, Ga, Si, Ge, Pb, and Zn) and a (NiaFe100-a)bX100-b alloy layer (where X represents at least one element selected from the group consisting of Cu, Au, Ag, Zn, Mn, Al, Cd, Zr, and Hf, and a represents a composition ratio satisfying 80< - a≦
100 in terms of atomic percent and b represents a composition ratio satisfying 60<
b≦
100 in terms of atomic percent). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification