TANDEM UV CHAMBER FOR CURING DIELECTRIC MATERIALS
First Claim
1. An ultraviolet (UV) curing chamber for curing dielectric materials disposed on substrates, comprising:
- a body defining first and second process regions that are separate and adjacent to one another;
a lid coupled to a top of the body to cover the first and second process regions, wherein the lid includes first and second quartz windows aligned respectively above the first and second process regions; and
first and second UV bulbs disposed respectively above the first and second windows.
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Accused Products
Abstract
An ultraviolet (UV) cure chamber enables curing a dielectric material disposed on a substrate and in situ cleaning thereof. A tandem process chamber provides two separate and adjacent process regions defined by a body covered with a lid having windows aligned respectively above each process region. One or more UV bulbs per process region that are covered by housings coupled to the lid emit UV light directed through the windows onto substrates located within the process regions. The UV bulbs can be an array of light emitting diodes or bulbs utilizing a source such as microwave or radio frequency. The UV light can be pulsed during a cure process. Using oxygen radical/ozone generated remotely and/or in-situ accomplishes cleaning of the chamber. Use of lamp arrays, relative motion of the substrate and lamp head, and real-time modification of lamp reflector shape and/or position can enhance uniformity of substrate illumination.
524 Citations
26 Claims
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1. An ultraviolet (UV) curing chamber for curing dielectric materials disposed on substrates, comprising:
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a body defining first and second process regions that are separate and adjacent to one another;
a lid coupled to a top of the body to cover the first and second process regions, wherein the lid includes first and second quartz windows aligned respectively above the first and second process regions; and
first and second UV bulbs disposed respectively above the first and second windows. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An ultraviolet (UV) curing chamber for curing a dielectric material disposed on a substrate, comprising:
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a body defining a process region where the substrate is supported;
a lid coupled to a top of the body to cover and seal a top of the process region;
first and second UV bulbs disposed above the process region; and
a housing coupled to the lid and covering the first and second UV bulbs. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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19-22. -22. (canceled)
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23. A semiconductor processing system, comprising:
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a transfer chamber;
a series of tandem process chambers mounted on the transfer chamber, wherein the tandem process chambers comprise an ultraviolet (UV) curing chamber for curing dielectric materials disposed on substrates, comprising;
a body defining first and second process regions that are separate and adjacent to one another;
a lid coupled to a top of the body to cover the first and second process regions, wherein the lid includes first and second quartz windows aligned respectively above the first and second process regions; and
first and second UV bulbs disposed respectively above the first and second windows. - View Dependent Claims (24, 25, 26)
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Specification