Hermetic bio-inert coatings for bio-implants fabricated using atomic layer deposition
First Claim
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1. A device biocompatible with a warm blooded animal, comprising a structure having a conformal coating thereon that is substantially pinhole free and is composed of one or more layers deposited by atomic layer deposition (ALD), the exterior layer of said conformal coating being selected from one or more of Al2O3 or TiO2 or ZrO2 or V2O5 or TiN or Si3N4 or SiC or Ti.
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Abstract
A biocompatible and bio-inert device is disclosed along with a method of making same. The device includes multiple layers of materials, preferably at least on layer of Al2O3, and an exterior amorphous layer, preferably TiO2.
13 Citations
20 Claims
- 1. A device biocompatible with a warm blooded animal, comprising a structure having a conformal coating thereon that is substantially pinhole free and is composed of one or more layers deposited by atomic layer deposition (ALD), the exterior layer of said conformal coating being selected from one or more of Al2O3 or TiO2 or ZrO2 or V2O5 or TiN or Si3N4 or SiC or Ti.
- 12. A device implantable in a human, comprising a structure containing an electrical component having a conformal coating thereon that is substantially pinhole free and has a thickness not less than about 100 Angstroms and is composed of one or more layers deposited by atomic layer deposition (ALD), the exterior layer of said conformal coating being selected from one or more of Al2O3 or TiO2 or ZrO2 or V2O5 or TiN or Si3N4 or SiC or Ti.
- 18. A method of making a device biocompatible with a warm blooded animal, comprising providing a structure, depositing one or more amorphous layers on the structure by atomic layer deposition (ALD) forming a conformal coating thereon that is substantially pinhole free, the exterior layer of the conformal coating being selected from one or more of Al2O3 or TiO2 or ZrO2 or V2O5 or TiN or Si3N4 or SiC or Ti.
Specification