FOCUSED ION BEAM DEPOSITION

• US 20060252255A9
• Filed: 07/30/2002
• Published: 11/09/2006
• Est. Priority Date: 12/29/2000
• Status: Active Grant

• Current Assignee: Ilan Gavish, Yuval Greenzweig
• Original Assignee: Ilan Gavish, Yuval Greenzweig
• Inventors: Gavish, Ilan, Greenzweig, Yuval
• Granted Patent: US 7,171,918 B2
• Time in Patent Office: Days
• US Class Current: 438/637
• CPC Class Codes: C23C 16/047 using irradiation by energy or particles
• CPC Class Codes: C23C 16/16 from metal carbonyl compounds
• CPC Class Codes: C23C 16/486 using ion beam radiation
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: C23C 16/56 After-treatment
• CPC Class Codes: H01L 21/28556 by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD H01L21/28518 - H01L21/28537 and H01L21/28568 take precedence
• CPC Class Codes: H01L 21/28568 the conductive layers comprising transition metals H01L21/28518 takes precedence
• CPC Class Codes: H01L 21/76886 Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
• CPC Class Codes: H01L 21/76892 modifying the pattern

Abstract

Introducing at least one metal such as cobalt, molybdenum, metal carbonyl, tungsten, platinum, or other suitable metal to a focused ion beam. Introducing the focused ion beam to a substrate within a processing chamber. Forming at least one layer over a substrate. Applying heat to the layer by, for example, a laser.

Claims

1. A system comprising:

a chamber configured to house a substrate for processing;

an energy source coupled to the chamber;

a system controller configured to control the introduction of at least one metal to a focused ion beam and to control the introduction of the focused ion beam from the energy source; and

a memory coupled to the controller comprising a computer-readable medium having a computer-readable program embodied therein for directing operation of the system, the computer-readable program comprising;

instructions for controlling the energy source and for introducing the metal into a focused ion beam which is introduced into the chamber over the substrate in which the metal from the focused ion beam forms at least one layer over the substrate; and

controlling the heat which is applied to the at least one layer.

2. The system of claim 1, wherein the metal is one of cobalt, metal carbonyl, molybdenum, platinum, and tungsten.

3. The system of claim 1, wherein introducing one of cobalt, metal carbonyl, molybdenum, platinum, and tungsten into the focused ion beam at a chamber pressure in the range of 10⁻

5 to 10<sup>−

7</sup> torr and about room temperature.

4. The system of claim 1, wherein the FIB heats a discrete area on the layer.

5. The system of claim 4, wherein one of a carbon and an oxygen is removed from the layer.

6. The system of claim 1, wherein the instructions for controlling the introduction of at least two metals comprises instructions involving introducing the cobalt, metal carbonyl, molybdenum, platinum, and tungsten in a controllable ratio.

7. A machine-readable storage medium containing executable program instructions which when executed cause a digital processing system to perform a method comprising:

introducing one of cobalt, molybdenum, platinum, metal carbonyl, and tungsten into a focused ion beam;

introducing a focused ion beam to a substrate within a processing chamber;

forming a layer over a substrate; and

heating the layer.

8. The machine readable medium of claim 7, the method further comprising:

forming at least two layers over the substrate.

9. The machine readable medium of claim 8, the method further comprising:

heating at least one layer.

10. The machine readable medium of claim 9, the method further comprising:

removing one of a carbon and an oxygen from the layer.

11. The method of claim 7, the method further comprising:

forming more than two alloy layers over the substrate.