Image sensor system for monitoring condition of electrode for electrochemical process tools
First Claim
1. A system for use in manufacturing semiconductor devices, the system comprising:
- an electrochemical processing tool comprising an electrode located at a central region of a platen, the electrode being adapted for contacting a wafer workpiece during certain processing of the wafer workpiece using the tool, and at least part of the electrode being viewable from above the platen when the electrochemical processing tool is operably assembled; and
an image sensor capable of capturing an image of the viewable part of the electrode, the image sensor being positioned above the platen, and the image sensor adapted to be aimed at the electrode when an image of the electrode is to be taken with the image sensor.
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Abstract
A system for use in manufacturing semiconductor devices, is provided. The system includes an electrochemical processing tool and an image sensor. The electrochemical processing tool includes an electrode located at a central region of a platen. The electrode is adapted for contacting a wafer workpiece during certain processing of the wafer workpiece using the tool. At least part of the electrode is viewable from above the platen when the electrochemical processing tool is operably assembled. The image sensor is capable of capturing an image of the viewable part of the electrode. The image sensor is positioned above the platen. The image sensor is adapted to be aimed at the electrode when an image of the electrode is to be taken with the image sensor.
17 Citations
20 Claims
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1. A system for use in manufacturing semiconductor devices, the system comprising:
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an electrochemical processing tool comprising an electrode located at a central region of a platen, the electrode being adapted for contacting a wafer workpiece during certain processing of the wafer workpiece using the tool, and at least part of the electrode being viewable from above the platen when the electrochemical processing tool is operably assembled; and
an image sensor capable of capturing an image of the viewable part of the electrode, the image sensor being positioned above the platen, and the image sensor adapted to be aimed at the electrode when an image of the electrode is to be taken with the image sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An electrode inspection apparatus for an electrochemical processing tool, the apparatus comprising:
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an image sensor adapted to be mounted on or adjacent to the electrochemical processing tool above a viewable electrode of the electrochemical processing tool, and the image sensor being adapted to selectively obtain images of the viewable electrode; and
an image processor communicably coupled to the image sensor so that the image processor may receive image signals from the image sensor, and the image processor comprising code to evaluate and process the image signals received from the image sensor. - View Dependent Claims (20)
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Specification