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Multiple local probe measuring device and method

  • US 20060255818A1
  • Filed: 07/17/2006
  • Published: 11/16/2006
  • Est. Priority Date: 09/20/1999
  • Status: Active Grant
First Claim
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1. A local probe measuring device for effecting local measurements referring to a:

  • sample, comprising;

    a first local probe for local measurements with respect to a sample or a reference surface, a second local probe for local measurements with respect to the sample or the reference surface, a rigid mechanical coupling between the first local probe and the second local probe, a positioning arrangement adapted to commonly adjust distance relations of the probes with respect to the sample or the reference surface to commonly adjust a first measurement condition of the first local probe with respect to the sample or the reference surface and p2 a second measurement condition of the second local probe with respect to the sample or the reference surface, a detection arrangement comprising a first detection arrangement associated with the first local probe adapted to independently detect first measurement data refering to local measurements effected by said first local probe and a second detection arrangement associated with the second local probe adapted to independently detect second measurement data refering to local measurements effected by said second local probe, wherein at least one of said local probes has associated an interaction field generator generating an interaction field to bring about or to influence an local interaction of the respective local probe with the sample or the reference surface.

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