Interface assembly and dry gas enclosing apparatus using same

• US 20060255821A1
• Filed: 04/20/2006
• Published: 11/16/2006
• Est. Priority Date: 05/16/2005
• Status: Active Grant

• Current Assignee: Agilent Technologies, Inc.
• Original Assignee: Agilent Technologies, Inc.
• Inventors: Goto, Akihiko
• Granted Patent: US 7,518,389 B2
• Time in Patent Office: Days
• US Class Current: 324/750.140
• CPC Class Codes: G01R 31/2889 Interfaces, e.g. between probe and tester G01R31/31905 and G01R1/07364 take precedence

Abstract

An interface assembly provided at a test head, for connecting a probe card to the test head. The interface assembly includes an interface comprising an interface body and a coaxial connector supported by the interface body, and a casing for enclosing a dry gas that is introduced between the test head and the probe card and leaks into the test head through a gap formed by the interface (20) in a state where the coaxial connector is engaged with a mating coaxial connector provided at the probe card. An interface assembly provided at a test head, for connecting a probe card to the test head, the interface assembly comprising: an interface comprising an interface body and a coaxial connector supported by the interface body; and a cover member provided at the interface, for enclosing a dry gas that is introduced between the test head and the probe card and leaks into the test head through a gap formed by the interface in a state where the coaxial connector is engaged with a mating coaxial connector provided at the probe card.

Claims

1. An interface assembly provided at a test head, for connecting a probe card to the test head, the interface assembly comprising:

an interface comprising an interface body and a coaxial connector supported by the interface body; and

a cover member provided at the interface, for enclosing a dry gas that is introduced between the test head and the probe card and leaks into the test head through a gap formed by the interface in a state where the coaxial connector is engaged with a mating coaxial connector provided at the probe card.

2. The interface assembly according to claim 1, further comprising

an annular member connected to an open edge of the cover member;

and

a support mechanism for supporting the interface on the annular member,

wherein the interface is supported so that a gap is provided between the interface and the annular member.

3. A dry gas enclosing apparatus comprising:

an interface assembly provided at a test head, for connecting a probe card to the test head, the interface assembly comprising;

an interface comprising an interface body and a coaxial connector supported by the interface body; and

a cover member provided at the interface, for enclosing a dry gas that is introduced between the test head and the probe card and leaks into the test head through a gap formed by the interface in a state where the coaxial connector is engaged with a mating coaxial connector provided at the probe card;

dry gas introducing means for introducing the dry gas to the periphery of the probe card; and

a tubular member disposed around the interface and surrounding the space between the test head and the probe card in a state where the coaxial connector is engaged with the mating coaxial connector provided at the probe card.

4. The dry gas enclosing apparatus according to claim 3, wherein

the interface assembly is fixed to the test head via a base plate disposed around the interface assembly and supporting a pogo pin;

and

the tubular member is supported by the base plate and disposed to face the probe card in a state where the coaxial connector is engaged with the mating coaxial connector.