Lithographic apparatus and device manufacturing method
First Claim
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1. A system, comprising:
- an illumination system configured to generate a beam of radiation;
a patterning device configured to pattern the beam of radiation;
a projection system configured to project the patterned beam onto a target portion of a substrate, the substrate located within a first plane, the projection system including an array of focusing elements located within a second plane; and
an actuator system configured to move the array of focusing elements along an axis that is perpendicular to the first and second planes.
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Abstract
An arrangement for adjusting the position on a substrate of a patterned beam generated by a light engine relative to the substrate. The arrangement moves an array of focusing elements, each of which focuses a portion of the patterned beam onto a point on the substrate, relative to an array of individually controllable elements to impart the pattern to the patterned beam.
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Citations
11 Claims
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1. A system, comprising:
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an illumination system configured to generate a beam of radiation;
a patterning device configured to pattern the beam of radiation;
a projection system configured to project the patterned beam onto a target portion of a substrate, the substrate located within a first plane, the projection system including an array of focusing elements located within a second plane; and
an actuator system configured to move the array of focusing elements along an axis that is perpendicular to the first and second planes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method, comprising:
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patterning a beam of radiation using a patterning device;
projecting the patterned beam onto a target portion of a substrate lying within a first plane using an array of focusing elements lying within a second plane, such that each of the focusing elements projects a respective portion of the patterned beam onto a corresponding portion of the target portion of the substrate; and
moving the array of focusing elements along an axis that is perpendicular to the first and second planes. - View Dependent Claims (11)
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Specification