Micro-actuator, head gimbal assembly and disk drive unit with the micro-actuator
First Claim
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1. A micro-actuator comprising:
- a support frame having a base, a moving plate, a leading beam to connect the base with the moving plate; and
two slider holding arms extending from both sides of the moving plate;
at least one piezoelectric elements bonding to the support frame to connect a free end of the base with the moving plate;
wherein the moving plate sways in a first direction or in a second direction when the at least one piezoelectric elements being actuated.
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Abstract
A micro-actuator of the invention includes a support frame having a base, a moving plate, a leading beam to connect the base with the moving plate; and two slider holding arms extending from both sides of the moving plate; at least one piezoelectric elements bonding to the support frame to connect a free end of the base with the moving plate; wherein the moving plate sways in a first direction or in a second direction when the at least one piezoelectric elements being actuated. The invention also discloses a head gimbal assembly and a disk drive unit using the micro-actuator.
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Citations
9 Claims
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1. A micro-actuator comprising:
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a support frame having a base, a moving plate, a leading beam to connect the base with the moving plate; and
two slider holding arms extending from both sides of the moving plate;
at least one piezoelectric elements bonding to the support frame to connect a free end of the base with the moving plate;
wherein the moving plate sways in a first direction or in a second direction when the at least one piezoelectric elements being actuated. - View Dependent Claims (2)
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3. A head gimbal assembly comprising:
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a slider;
a micro-actuator;
wherein the micro-actuator comprising a support frame and at least one PZT elements each of which having at least one PZT electrical pad;
a suspension to support the slider and the micro-actuator;
wherein at least one suspension electrical pads are provided on the suspension corresponding to the at least one PZT electrical pads; and
a conductive film providing between the suspension electrical pads and the PZT electrical pads for establishing an electrical connection therebetween;
wherein at least one conductive medium is provided on each suspension electrical pad to assist the electrical connection between the conductive film and each suspension electrical pad. - View Dependent Claims (4, 5, 6, 7)
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8. A disk drive unit comprising:
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a head gimbal assembly;
a drive arm to connect with the head gimbal assembly;
a disk; and
a spindle motor to spin the disk;
wherein the head gimbal assembly comprisinga slider;
a micro-actuator;
wherein the micro-actuator comprising a support frame and at least one PZT elements each of which having at least one PZT electrical pad;
a suspension to support the slider and the micro-actuator;
wherein at least one suspension electrical pads are provided on the suspension corresponding to the at least one PZT electrical pads; and
a conductive film providing between the suspension electrical pads and the PZT electrical pads for establishing an electrical connection therebetween;
wherein at least one conductive medium is provided on each suspension electrical pad to assist the electrical connection between the conductive film and each suspension electrical pad. - View Dependent Claims (9)
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Specification